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- W2017369577 abstract "Carbon nitride films have been formed using a magnetic field filtered plasma stream deposition system. The electrical, optical and mechanical properties of these films deposited at different N2 partial pressures have been studied. Infrared spectra exhibit characteristic bands of carbon nitrogen bonds at 2200, 1500, 1350 cm−1, showing that the C and N atoms are chemically bonded in the films. X-ray photoelectron spectroscopy has been employed to measure the atomic ratio of N to C in the films. By deconvolution of the XPS spectra, it was identified that the films consist of three phases, namely, β-C3N4, CNx and ta-C. The relative fractions of these phases in the films were also determined. The optical band gap obtained from optical absorption spectra varies from 3.85 to 4.51 eV depending on the N2 partial pressure. The measured value of Vickers hardness Hv is between 4000 and 7000 kg/mm2. The effect of N2 partial pressure on the properties of these films is also discussed." @default.
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- W2017369577 date "1998-06-01" @default.
- W2017369577 modified "2023-10-16" @default.
- W2017369577 title "Characteristics of carbon nitride films prepared by magnetic filtered plasma stream" @default.
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- W2017369577 doi "https://doi.org/10.1016/s0040-6090(97)01036-5" @default.
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