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• W2017373505 endingPage "025504" @default.
• W2017373505 startingPage "025504" @default.
• W2017373505 abstract "A two-step atomic layer deposition (ALD) process, applying either thermal or plasma-assisted Ta nitridation with a NH3/H2/Ar gas mixture, was conducted to discern the formation conditions of the cubic-TaN phase versus those of the Ta3N5 phase at an extremely low deposition temperature of 200 °C. Metallic cubic-TaN films with an electrical resistivity of 400 µΩ cm were successfully grown by thermal nitridation at 200 °C, while the incorporation of the Ta3N5 phase in TaN films could not be suppressed in the plasma nitridation process owing to large amounts of reactive radicals inherent to plasma nitridation. The dielectric Ta3N5 phase led to a significant increase in electrical resistivity, up to approximately 2500 µΩ cm. The relative concentration of cubic TaN and Ta3N5 phases was precisely controlled by changes in the nitridation time and the NH3 flow rate during the plasma-assisted nitridation process." @default.
• W2017373505 created "2016-06-24" @default.
• W2017373505 creator A5021522570 @default.
• W2017373505 creator A5036509932 @default.
• W2017373505 creator A5051290699 @default.
• W2017373505 date "2009-02-20" @default.
• W2017373505 modified "2023-10-18" @default.
• W2017373505 title "Comparison of Tantalum Nitride Films for Different NH₃/H₂/Ar Reactant States in Two-Step Atomic Layer Deposition" @default.
• W2017373505 cites W1633007946 @default.
• W2017373505 cites W1967637629 @default.
• W2017373505 cites W1978444321 @default.
• W2017373505 cites W1982442231 @default.
• W2017373505 cites W1983406786 @default.
• W2017373505 cites W2003164735 @default.
• W2017373505 cites W2007973584 @default.
• W2017373505 cites W2009076079 @default.
• W2017373505 cites W2011197971 @default.
• W2017373505 cites W2036011423 @default.
• W2017373505 cites W2044108992 @default.
• W2017373505 cites W2051926442 @default.
• W2017373505 cites W2053204255 @default.
• W2017373505 cites W2053306366 @default.
• W2017373505 cites W2065422658 @default.
• W2017373505 cites W2068291522 @default.
• W2017373505 cites W2074023116 @default.
• W2017373505 cites W2088392833 @default.
• W2017373505 cites W2100496815 @default.
• W2017373505 cites W2107488335 @default.
• W2017373505 cites W2129477636 @default.
• W2017373505 cites W4206818003 @default.
• W2017373505 doi "https://doi.org/10.1143/jjap.48.025504" @default.
• W2017373505 hasPublicationYear "2009" @default.
• W2017373505 type Work @default.
• W2017373505 sameAs 2017373505 @default.
• W2017373505 citedByCount "4" @default.
• W2017373505 countsByYear W20173735052013 @default.
• W2017373505 countsByYear W20173735052018 @default.
• W2017373505 countsByYear W20173735052019 @default.
• W2017373505 crossrefType "journal-article" @default.
• W2017373505 hasAuthorship W2017373505A5021522570 @default.
• W2017373505 hasAuthorship W2017373505A5036509932 @default.
• W2017373505 hasAuthorship W2017373505A5051290699 @default.
• W2017373505 hasConcept C113196181 @default.
• W2017373505 hasConcept C119599485 @default.
• W2017373505 hasConcept C121332964 @default.
• W2017373505 hasConcept C127413603 @default.
• W2017373505 hasConcept C133386390 @default.
• W2017373505 hasConcept C151730666 @default.
• W2017373505 hasConcept C171250308 @default.
• W2017373505 hasConcept C178790620 @default.
• W2017373505 hasConcept C185592680 @default.
• W2017373505 hasConcept C191897082 @default.
• W2017373505 hasConcept C192562407 @default.
• W2017373505 hasConcept C194760766 @default.
• W2017373505 hasConcept C2778112282 @default.
• W2017373505 hasConcept C2779227376 @default.
• W2017373505 hasConcept C2816523 @default.
• W2017373505 hasConcept C43617362 @default.
• W2017373505 hasConcept C44280652 @default.
• W2017373505 hasConcept C49040817 @default.
• W2017373505 hasConcept C514619126 @default.
• W2017373505 hasConcept C57410435 @default.
• W2017373505 hasConcept C62520636 @default.
• W2017373505 hasConcept C64297162 @default.
• W2017373505 hasConcept C69544855 @default.
• W2017373505 hasConcept C69990965 @default.
• W2017373505 hasConcept C82706917 @default.
• W2017373505 hasConcept C86803240 @default.
• W2017373505 hasConceptScore W2017373505C113196181 @default.
• W2017373505 hasConceptScore W2017373505C119599485 @default.
• W2017373505 hasConceptScore W2017373505C121332964 @default.
• W2017373505 hasConceptScore W2017373505C127413603 @default.
• W2017373505 hasConceptScore W2017373505C133386390 @default.
• W2017373505 hasConceptScore W2017373505C151730666 @default.
• W2017373505 hasConceptScore W2017373505C171250308 @default.
• W2017373505 hasConceptScore W2017373505C178790620 @default.
• W2017373505 hasConceptScore W2017373505C185592680 @default.
• W2017373505 hasConceptScore W2017373505C191897082 @default.
• W2017373505 hasConceptScore W2017373505C192562407 @default.
• W2017373505 hasConceptScore W2017373505C194760766 @default.
• W2017373505 hasConceptScore W2017373505C2778112282 @default.
• W2017373505 hasConceptScore W2017373505C2779227376 @default.
• W2017373505 hasConceptScore W2017373505C2816523 @default.
• W2017373505 hasConceptScore W2017373505C43617362 @default.
• W2017373505 hasConceptScore W2017373505C44280652 @default.
• W2017373505 hasConceptScore W2017373505C49040817 @default.
• W2017373505 hasConceptScore W2017373505C514619126 @default.
• W2017373505 hasConceptScore W2017373505C57410435 @default.
• W2017373505 hasConceptScore W2017373505C62520636 @default.
• W2017373505 hasConceptScore W2017373505C64297162 @default.
• W2017373505 hasConceptScore W2017373505C69544855 @default.
• W2017373505 hasConceptScore W2017373505C69990965 @default.
• W2017373505 hasConceptScore W2017373505C82706917 @default.
• W2017373505 hasConceptScore W2017373505C86803240 @default.
• W2017373505 hasIssue "2" @default.
• W2017373505 hasLocation W20173735051 @default.
• W2017373505 hasOpenAccess W2017373505 @default.
• W2017373505 hasPrimaryLocation W20173735051 @default.

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