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- W2017381270 abstract "The excimer laser induced CVD of boron nitride films is reported. Basic dependencies of deposition rate on pulsed laser fluence, vapor pressure and substrate temperature are considered. Under optimum conditions h-BN film deposition rate of the order of 1 A per pulse was realized. Structure and composition of BN-films were characterized by AES and Raman spectroscopy. A simple deposition model is proposed taking into account chemisorption and partial decomposition of borazine molecules on the substrate surface between laser pulses and final decomposition of the intermediate product during the laser pulse." @default.
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- W2017381270 date "1995-09-25" @default.
- W2017381270 modified "2023-09-23" @default.
- W2017381270 title "<title>Excimer-laser-induced chemical vapor deposition of boron nitride films from borazine</title>" @default.
- W2017381270 doi "https://doi.org/10.1117/12.221488" @default.
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