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- W2017383362 abstract "Mastering the delicate art of epitaxial growth requires an understanding of the physical processes involved to enable them to be accurately and reproducibly controlled. EpiSoft's deposition process controller takes an expert system-based approach to provide the grower not only with the means of defining and growing complex structures with ease, but also with support for the host of other activities associated with his or her art." @default.
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- W2017383362 date "1995-12-01" @default.
- W2017383362 modified "2023-09-27" @default.
- W2017383362 title "The art of deposition process control" @default.
- W2017383362 doi "https://doi.org/10.1016/0961-1290(95)80076-x" @default.
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