Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017443907> ?p ?o ?g. }
- W2017443907 endingPage "557" @default.
- W2017443907 startingPage "552" @default.
- W2017443907 abstract "Al2O3 thin films were deposited on silicon, steel and nickel substrates to fabricate MOS and MIM devices. The films were prepared by spray pyrolysis method using a spray solution of Aluminium acetyl acetonate dissolved in dimethyl formamide and this solution was sprayed on to the hot substrates at temperatures of 300 and 350 °C. The films were amorphous in nature as detected by XRD. Capacitance versus voltage (C–V), current versus voltage (I–V) and capacitance versus frequency (C–f) measurements were taken for these films. MOS capacitor was used as a humidity sensor using the home made humidity sensor setup. ac capacitance and parallel resistance of the capacitor as a function of humidity were studied. It was found that the capacitance value increases from 0.537 to 2.073 nf with the increase in relative humidity (RH) from 0 to 90% and the resistance decreases from 153 to 93 kΩ with the increase in relative humidity from 20 to 87%. Relative dielectric constant versus temperature measurements were done for the MOS device to check its ferroelectric behavior and its critical temperature was found to be around 66 °C. MIM device was also used as a humidity sensor by measuring capacitance as a function of time by keeping the sensor in a dessicator. The 555 timer circuits were used to check the sensor behavior of the MOS device. Volume resistivity and breakdown electric field of the film deposited on steel were measured and found to be 5 × 1011 Ω cm and 5 MV/cm, respectively." @default.
- W2017443907 created "2016-06-24" @default.
- W2017443907 creator A5019777229 @default.
- W2017443907 creator A5080829071 @default.
- W2017443907 creator A5088361712 @default.
- W2017443907 creator A5090967695 @default.
- W2017443907 date "2007-04-01" @default.
- W2017443907 modified "2023-10-01" @default.
- W2017443907 title "Characterization of Al2O3 thin films prepared by spray pyrolysis method for humidity sensor" @default.
- W2017443907 cites W1981083366 @default.
- W2017443907 cites W1981715745 @default.
- W2017443907 cites W1989281205 @default.
- W2017443907 cites W2000453174 @default.
- W2017443907 cites W2002178743 @default.
- W2017443907 cites W2015663825 @default.
- W2017443907 cites W2024643987 @default.
- W2017443907 cites W2026495613 @default.
- W2017443907 cites W2029422721 @default.
- W2017443907 cites W2044207359 @default.
- W2017443907 cites W2060010363 @default.
- W2017443907 cites W2069809145 @default.
- W2017443907 cites W2083625593 @default.
- W2017443907 cites W2165219985 @default.
- W2017443907 cites W2168946364 @default.
- W2017443907 doi "https://doi.org/10.1016/j.sna.2006.10.004" @default.
- W2017443907 hasPublicationYear "2007" @default.
- W2017443907 type Work @default.
- W2017443907 sameAs 2017443907 @default.
- W2017443907 citedByCount "57" @default.
- W2017443907 countsByYear W20174439072012 @default.
- W2017443907 countsByYear W20174439072013 @default.
- W2017443907 countsByYear W20174439072014 @default.
- W2017443907 countsByYear W20174439072015 @default.
- W2017443907 countsByYear W20174439072016 @default.
- W2017443907 countsByYear W20174439072017 @default.
- W2017443907 countsByYear W20174439072019 @default.
- W2017443907 countsByYear W20174439072020 @default.
- W2017443907 countsByYear W20174439072021 @default.
- W2017443907 countsByYear W20174439072022 @default.
- W2017443907 countsByYear W20174439072023 @default.
- W2017443907 crossrefType "journal-article" @default.
- W2017443907 hasAuthorship W2017443907A5019777229 @default.
- W2017443907 hasAuthorship W2017443907A5080829071 @default.
- W2017443907 hasAuthorship W2017443907A5088361712 @default.
- W2017443907 hasAuthorship W2017443907A5090967695 @default.
- W2017443907 hasConcept C113196181 @default.
- W2017443907 hasConcept C119599485 @default.
- W2017443907 hasConcept C121332964 @default.
- W2017443907 hasConcept C127413603 @default.
- W2017443907 hasConcept C133386390 @default.
- W2017443907 hasConcept C147789679 @default.
- W2017443907 hasConcept C151420433 @default.
- W2017443907 hasConcept C158960510 @default.
- W2017443907 hasConcept C159985019 @default.
- W2017443907 hasConcept C165801399 @default.
- W2017443907 hasConcept C171250308 @default.
- W2017443907 hasConcept C17525397 @default.
- W2017443907 hasConcept C178790620 @default.
- W2017443907 hasConcept C185592680 @default.
- W2017443907 hasConcept C19067145 @default.
- W2017443907 hasConcept C192562407 @default.
- W2017443907 hasConcept C30066665 @default.
- W2017443907 hasConcept C43617362 @default.
- W2017443907 hasConcept C49040817 @default.
- W2017443907 hasConcept C52192207 @default.
- W2017443907 hasConcept C56052488 @default.
- W2017443907 hasConcept C97355855 @default.
- W2017443907 hasConceptScore W2017443907C113196181 @default.
- W2017443907 hasConceptScore W2017443907C119599485 @default.
- W2017443907 hasConceptScore W2017443907C121332964 @default.
- W2017443907 hasConceptScore W2017443907C127413603 @default.
- W2017443907 hasConceptScore W2017443907C133386390 @default.
- W2017443907 hasConceptScore W2017443907C147789679 @default.
- W2017443907 hasConceptScore W2017443907C151420433 @default.
- W2017443907 hasConceptScore W2017443907C158960510 @default.
- W2017443907 hasConceptScore W2017443907C159985019 @default.
- W2017443907 hasConceptScore W2017443907C165801399 @default.
- W2017443907 hasConceptScore W2017443907C171250308 @default.
- W2017443907 hasConceptScore W2017443907C17525397 @default.
- W2017443907 hasConceptScore W2017443907C178790620 @default.
- W2017443907 hasConceptScore W2017443907C185592680 @default.
- W2017443907 hasConceptScore W2017443907C19067145 @default.
- W2017443907 hasConceptScore W2017443907C192562407 @default.
- W2017443907 hasConceptScore W2017443907C30066665 @default.
- W2017443907 hasConceptScore W2017443907C43617362 @default.
- W2017443907 hasConceptScore W2017443907C49040817 @default.
- W2017443907 hasConceptScore W2017443907C52192207 @default.
- W2017443907 hasConceptScore W2017443907C56052488 @default.
- W2017443907 hasConceptScore W2017443907C97355855 @default.
- W2017443907 hasIssue "2" @default.
- W2017443907 hasLocation W20174439071 @default.
- W2017443907 hasOpenAccess W2017443907 @default.
- W2017443907 hasPrimaryLocation W20174439071 @default.
- W2017443907 hasRelatedWork W1992257316 @default.
- W2017443907 hasRelatedWork W1994753809 @default.
- W2017443907 hasRelatedWork W2021714583 @default.
- W2017443907 hasRelatedWork W2143128254 @default.
- W2017443907 hasRelatedWork W2383379936 @default.