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• W2017458218 endingPage "1160" @default.
• W2017458218 startingPage "1153" @default.
• W2017458218 abstract "Flat, B-doped, low-stress and non-stress polysilicon (poly-Si) thin films were deposited by low pressure chemical vapor deposition (LPCVD). X-ray diffraction (XRD), combined with atomic force microscopy (AFM) and Raman system, UV-Raman measurements and spectroscopic ellipsometry, was used to study the microstructure, the morphology and optical properties of the films. The results indicate that the surface roughness is related to the grain size and the change in the microstructure. The B-doped poly-Si shows a tensile stress, while the flat poly-Si shows a high compressive stress. The bandgap of the B-doped poly-Si is the narrowest because of its most disordered microstructure." @default.
• W2017458218 created "2016-06-24" @default.
• W2017458218 creator A5065417158 @default.
• W2017458218 creator A5070196864 @default.
• W2017458218 creator A5071507323 @default.
• W2017458218 date "2015-06-01" @default.
• W2017458218 modified "2023-10-16" @default.
• W2017458218 title "Investigating the effects of microstructure on optical properties of different kinds of polysilicon thin films" @default.
• W2017458218 cites W1968224120 @default.
• W2017458218 cites W1971173811 @default.
• W2017458218 cites W1979501235 @default.
• W2017458218 cites W1989396125 @default.
• W2017458218 cites W2001697633 @default.
• W2017458218 cites W2004546503 @default.
• W2017458218 cites W2007482718 @default.
• W2017458218 cites W2008054616 @default.
• W2017458218 cites W2009952406 @default.
• W2017458218 cites W2014564756 @default.
• W2017458218 cites W2014623839 @default.
• W2017458218 cites W2022124761 @default.
• W2017458218 cites W2040875144 @default.
• W2017458218 cites W2050972474 @default.
• W2017458218 cites W2051307234 @default.
• W2017458218 cites W2063320852 @default.
• W2017458218 cites W2063799122 @default.
• W2017458218 cites W2071132849 @default.
• W2017458218 cites W2079228976 @default.
• W2017458218 cites W2082935391 @default.
• W2017458218 cites W2088308256 @default.
• W2017458218 cites W2094285478 @default.
• W2017458218 cites W2097383084 @default.
• W2017458218 cites W2115295828 @default.
• W2017458218 cites W2128022452 @default.
• W2017458218 cites W2137667313 @default.
• W2017458218 cites W2147522272 @default.
• W2017458218 cites W2157349103 @default.
• W2017458218 cites W2164701373 @default.
• W2017458218 cites W2075433303 @default.
• W2017458218 doi "https://doi.org/10.1016/j.physleta.2015.02.023" @default.
• W2017458218 hasPublicationYear "2015" @default.
• W2017458218 type Work @default.
• W2017458218 sameAs 2017458218 @default.
• W2017458218 citedByCount "17" @default.
• W2017458218 countsByYear W20174582182016 @default.
• W2017458218 countsByYear W20174582182017 @default.
• W2017458218 countsByYear W20174582182018 @default.
• W2017458218 countsByYear W20174582182019 @default.
• W2017458218 countsByYear W20174582182021 @default.
• W2017458218 countsByYear W20174582182022 @default.
• W2017458218 countsByYear W20174582182023 @default.
• W2017458218 crossrefType "journal-article" @default.
• W2017458218 hasAuthorship W2017458218A5065417158 @default.
• W2017458218 hasAuthorship W2017458218A5070196864 @default.
• W2017458218 hasAuthorship W2017458218A5071507323 @default.
• W2017458218 hasConcept C107365816 @default.
• W2017458218 hasConcept C112950240 @default.
• W2017458218 hasConcept C113196181 @default.
• W2017458218 hasConcept C120665830 @default.
• W2017458218 hasConcept C121332964 @default.
• W2017458218 hasConcept C138885662 @default.
• W2017458218 hasConcept C159985019 @default.
• W2017458218 hasConcept C171250308 @default.
• W2017458218 hasConcept C181966813 @default.
• W2017458218 hasConcept C18293161 @default.
• W2017458218 hasConcept C185592680 @default.
• W2017458218 hasConcept C19067145 @default.
• W2017458218 hasConcept C192191005 @default.
• W2017458218 hasConcept C192562407 @default.
• W2017458218 hasConcept C21036866 @default.
• W2017458218 hasConcept C40003534 @default.
• W2017458218 hasConcept C41895202 @default.
• W2017458218 hasConcept C43617362 @default.
• W2017458218 hasConcept C49040817 @default.
• W2017458218 hasConcept C57410435 @default.
• W2017458218 hasConcept C57863236 @default.
• W2017458218 hasConcept C87976508 @default.
• W2017458218 hasConceptScore W2017458218C107365816 @default.
• W2017458218 hasConceptScore W2017458218C112950240 @default.
• W2017458218 hasConceptScore W2017458218C113196181 @default.
• W2017458218 hasConceptScore W2017458218C120665830 @default.
• W2017458218 hasConceptScore W2017458218C121332964 @default.
• W2017458218 hasConceptScore W2017458218C138885662 @default.
• W2017458218 hasConceptScore W2017458218C159985019 @default.
• W2017458218 hasConceptScore W2017458218C171250308 @default.
• W2017458218 hasConceptScore W2017458218C181966813 @default.
• W2017458218 hasConceptScore W2017458218C18293161 @default.
• W2017458218 hasConceptScore W2017458218C185592680 @default.
• W2017458218 hasConceptScore W2017458218C19067145 @default.
• W2017458218 hasConceptScore W2017458218C192191005 @default.
• W2017458218 hasConceptScore W2017458218C192562407 @default.
• W2017458218 hasConceptScore W2017458218C21036866 @default.
• W2017458218 hasConceptScore W2017458218C40003534 @default.
• W2017458218 hasConceptScore W2017458218C41895202 @default.
• W2017458218 hasConceptScore W2017458218C43617362 @default.
• W2017458218 hasConceptScore W2017458218C49040817 @default.
• W2017458218 hasConceptScore W2017458218C57410435 @default.
• W2017458218 hasConceptScore W2017458218C57863236 @default.
• W2017458218 hasConceptScore W2017458218C87976508 @default.

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