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- W2017461210 endingPage "1015" @default.
- W2017461210 startingPage "1011" @default.
- W2017461210 abstract "We have analyzed the electrical properties of both SiO/sub x/ on InGaAs and SiN/sub x/ on InGaAs, by utilizing a metal-insulator-semiconductor (MIS) structure. For improving film or interface quality, both oxide and nitride samples underwent furnace annealing (FA) in hydrogen at various temperatures. From the leakage current and capacitance characterization, we found that the electrical properties of the nitride samples such as leakage current, injected charges, and interface trap density are improved by FA, while on the contrary, the properties of the oxide samples are slightly deteriorated. The optimum annealing temperature for nitride samples is in the temperature range of /spl sim/400 to 450/spl deg/C. Also, by secondary ion mass spectroscopy (SIMS) analysis, we provide evidence of inter-diffusion occurring in the oxide samples after annealing." @default.
- W2017461210 created "2016-06-24" @default.
- W2017461210 creator A5022198651 @default.
- W2017461210 creator A5031986624 @default.
- W2017461210 creator A5037021935 @default.
- W2017461210 creator A5049075302 @default.
- W2017461210 creator A5087481288 @default.
- W2017461210 date "2001-01-01" @default.
- W2017461210 modified "2023-10-18" @default.
- W2017461210 title "Electrical characterization of SiO/sub x/ and SiN/sub x/ prepared by PECVD technique on In/sub 0.53/Ga/sub 0.47/As" @default.
- W2017461210 cites W1815423143 @default.
- W2017461210 cites W1976981937 @default.
- W2017461210 cites W1978269028 @default.
- W2017461210 cites W1985854158 @default.
- W2017461210 cites W2008214548 @default.
- W2017461210 cites W2017751332 @default.
- W2017461210 cites W2042679510 @default.
- W2017461210 cites W2054923039 @default.
- W2017461210 cites W2072310783 @default.
- W2017461210 cites W2072649197 @default.
- W2017461210 cites W2088130443 @default.
- W2017461210 cites W2138259386 @default.
- W2017461210 cites W2171308590 @default.
- W2017461210 doi "https://doi.org/10.1109/94.971459" @default.
- W2017461210 hasPublicationYear "2001" @default.
- W2017461210 type Work @default.
- W2017461210 sameAs 2017461210 @default.
- W2017461210 citedByCount "7" @default.
- W2017461210 countsByYear W20174612102012 @default.
- W2017461210 countsByYear W20174612102016 @default.
- W2017461210 crossrefType "journal-article" @default.
- W2017461210 hasAuthorship W2017461210A5022198651 @default.
- W2017461210 hasAuthorship W2017461210A5031986624 @default.
- W2017461210 hasAuthorship W2017461210A5037021935 @default.
- W2017461210 hasAuthorship W2017461210A5049075302 @default.
- W2017461210 hasAuthorship W2017461210A5087481288 @default.
- W2017461210 hasConcept C113196181 @default.
- W2017461210 hasConcept C145148216 @default.
- W2017461210 hasConcept C171250308 @default.
- W2017461210 hasConcept C178790620 @default.
- W2017461210 hasConcept C185592680 @default.
- W2017461210 hasConcept C191897082 @default.
- W2017461210 hasConcept C192562407 @default.
- W2017461210 hasConcept C194760766 @default.
- W2017461210 hasConcept C2777855556 @default.
- W2017461210 hasConcept C2779227376 @default.
- W2017461210 hasConcept C2779851234 @default.
- W2017461210 hasConcept C38347018 @default.
- W2017461210 hasConcept C43617362 @default.
- W2017461210 hasConcept C49040817 @default.
- W2017461210 hasConcept C57410435 @default.
- W2017461210 hasConcept C77671233 @default.
- W2017461210 hasConceptScore W2017461210C113196181 @default.
- W2017461210 hasConceptScore W2017461210C145148216 @default.
- W2017461210 hasConceptScore W2017461210C171250308 @default.
- W2017461210 hasConceptScore W2017461210C178790620 @default.
- W2017461210 hasConceptScore W2017461210C185592680 @default.
- W2017461210 hasConceptScore W2017461210C191897082 @default.
- W2017461210 hasConceptScore W2017461210C192562407 @default.
- W2017461210 hasConceptScore W2017461210C194760766 @default.
- W2017461210 hasConceptScore W2017461210C2777855556 @default.
- W2017461210 hasConceptScore W2017461210C2779227376 @default.
- W2017461210 hasConceptScore W2017461210C2779851234 @default.
- W2017461210 hasConceptScore W2017461210C38347018 @default.
- W2017461210 hasConceptScore W2017461210C43617362 @default.
- W2017461210 hasConceptScore W2017461210C49040817 @default.
- W2017461210 hasConceptScore W2017461210C57410435 @default.
- W2017461210 hasConceptScore W2017461210C77671233 @default.
- W2017461210 hasIssue "6" @default.
- W2017461210 hasLocation W20174612101 @default.
- W2017461210 hasOpenAccess W2017461210 @default.
- W2017461210 hasPrimaryLocation W20174612101 @default.
- W2017461210 hasRelatedWork W1977643751 @default.
- W2017461210 hasRelatedWork W1995867608 @default.
- W2017461210 hasRelatedWork W2017461210 @default.
- W2017461210 hasRelatedWork W2033013336 @default.
- W2017461210 hasRelatedWork W2053803738 @default.
- W2017461210 hasRelatedWork W2078584412 @default.
- W2017461210 hasRelatedWork W2082824188 @default.
- W2017461210 hasRelatedWork W2091626561 @default.
- W2017461210 hasRelatedWork W2120835426 @default.
- W2017461210 hasRelatedWork W4283748857 @default.
- W2017461210 hasVolume "8" @default.
- W2017461210 isParatext "false" @default.
- W2017461210 isRetracted "false" @default.
- W2017461210 magId "2017461210" @default.
- W2017461210 workType "article" @default.