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- W2017479980 abstract "Artical is dedicated to solving some problems connected with lanufacturing accurate master scales with standard graduation of 10 μm - master scales making and checking on machine controlled by laserinterferometer - achievment the best quality of photoprocess" @default.
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- W2017479980 date "1990-04-03" @default.
- W2017479980 modified "2023-09-23" @default.
- W2017479980 title "Electrooptical Incremental Measuring System" @default.
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