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- W2017504174 abstract "Samples of nearly monodisperse polymethyl methacrylate, PMMA, of molecular weights ranging from 30000-500000 have been investigated. The sensitivity to electrons was found to improve with the use of low molecular weight PMMA which is attributed to its high solvent-polymer interaction parameter. The chemical nature of the solvent present in the film pre-baked below the glass transition temperature (Tg) was found to have an effect on the contrast value." @default.
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- W2017504174 date "1987-11-01" @default.
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- W2017504174 title "Some experimental observations on nearly monodisperse polymethyl methacrylate as an electron resist" @default.
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- W2017504174 doi "https://doi.org/10.1088/0268-1242/2/11/009" @default.
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