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- W2017521109 abstract "This study demonstrates improvement of crystal quality of GaN film by growing it on a micro-faceted GaN template fabricated by in situ etching with an HCl/N2 etching gas mixture at 1050 °C in hydride vapor phase epitaxy (HVPE) reactor. Cathodoluminescence images of the cross-sectional structure showed that there were six sublays in the GaN film grown with in situ etching for five times. Etch pit density (EPD) and high-resolution X-ray diffraction (HR-XRD) measurements showed that the crystal quality of GaN thick film grown on micro-faceted GaN template was better than that of the as-grown GaN. A large number of columnar structures were formed on the micro-faceted GaN template at the initial stage of regrowth process, the coalescence of which played an important role in the reduction of threading dislocation density during the GaN growth. A model has been developed to explain the mechanism of forming process of the columnar structures." @default.
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- W2017521109 date "2013-12-01" @default.
- W2017521109 modified "2023-10-14" @default.
- W2017521109 title "A study of GaN regrowth on the micro-faceted GaN template formed by in situ HCl etching" @default.
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- W2017521109 doi "https://doi.org/10.1016/j.apsusc.2013.09.090" @default.
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