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- W2017604539 abstract "We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2–6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 × 2 array emits up to 34.6 dB SPL at 1 cm distance." @default.
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- W2017604539 date "2012-01-01" @default.
- W2017604539 modified "2023-10-03" @default.
- W2017604539 title "Ultrasonic electrostatic actuators on a flexible substrate" @default.
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- W2017604539 doi "https://doi.org/10.1109/memsys.2012.6170377" @default.
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