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• W2017644964 endingPage "G91" @default.
• W2017644964 startingPage "G91" @default.
• W2017644964 abstract "We used atomic force microscopy (AFM) to study the fundamentals of chemical mechanical polishing (CMP) of copper oxidized in an aqueous solution of 5 wt % peroxide and 1 wt % of glycine at varying pH levels. An AFM tip was used to mimic a single abrasive silica particle typical of those used in CMP slurry. AFM scanning removes the surface layer in different rates depending on the depth of removal and the pH of the solution. Oxide removal happens considerably faster than the CMP copper removal. The friction forces acting between the AFM tip and surface during the polishing process were measured. The correlation between those forces and the removal rate is discussed. © 2003 The Electrochemical Society. All rights reserved." @default.
• W2017644964 created "2016-06-24" @default.
• W2017644964 creator A5035943790 @default.
• W2017644964 creator A5043516298 @default.
• W2017644964 creator A5062717841 @default.
• W2017644964 date "2003-01-01" @default.
• W2017644964 modified "2023-09-24" @default.
• W2017644964 title "In Situ AFM Study of Surface Layer Removal during Copper CMP" @default.
• W2017644964 cites W1972361556 @default.
• W2017644964 cites W1988217862 @default.
• W2017644964 cites W1992791539 @default.
• W2017644964 cites W2006748967 @default.
• W2017644964 cites W2021216663 @default.
• W2017644964 cites W2021397997 @default.
• W2017644964 cites W2035871952 @default.
• W2017644964 cites W2036829936 @default.
• W2017644964 cites W2053787721 @default.
• W2017644964 cites W2066247223 @default.
• W2017644964 cites W2067714612 @default.
• W2017644964 cites W2070372443 @default.
• W2017644964 cites W2075194566 @default.
• W2017644964 cites W2082877303 @default.
• W2017644964 cites W2084403547 @default.
• W2017644964 cites W2091989934 @default.
• W2017644964 cites W2106112714 @default.
• W2017644964 cites W2122786654 @default.
• W2017644964 cites W2122804682 @default.
• W2017644964 cites W2169119348 @default.
• W2017644964 cites W645339294 @default.
• W2017644964 doi "https://doi.org/10.1149/1.1576051" @default.
• W2017644964 hasPublicationYear "2003" @default.
• W2017644964 type Work @default.
• W2017644964 sameAs 2017644964 @default.
• W2017644964 citedByCount "21" @default.
• W2017644964 countsByYear W20176449642012 @default.
• W2017644964 countsByYear W20176449642013 @default.
• W2017644964 countsByYear W20176449642018 @default.
• W2017644964 countsByYear W20176449642019 @default.
• W2017644964 countsByYear W20176449642021 @default.
• W2017644964 countsByYear W20176449642022 @default.
• W2017644964 countsByYear W20176449642023 @default.
• W2017644964 crossrefType "journal-article" @default.
• W2017644964 hasAuthorship W2017644964A5035943790 @default.
• W2017644964 hasAuthorship W2017644964A5043516298 @default.
• W2017644964 hasAuthorship W2017644964A5062717841 @default.
• W2017644964 hasBestOaLocation W20176449641 @default.
• W2017644964 hasConcept C102951782 @default.
• W2017644964 hasConcept C127413603 @default.
• W2017644964 hasConcept C138113353 @default.
• W2017644964 hasConcept C147789679 @default.
• W2017644964 hasConcept C159985019 @default.
• W2017644964 hasConcept C171250308 @default.
• W2017644964 hasConcept C17525397 @default.
• W2017644964 hasConcept C178790620 @default.
• W2017644964 hasConcept C180088628 @default.
• W2017644964 hasConcept C184651966 @default.
• W2017644964 hasConcept C185592680 @default.
• W2017644964 hasConcept C191897082 @default.
• W2017644964 hasConcept C192562407 @default.
• W2017644964 hasConcept C2779227376 @default.
• W2017644964 hasConcept C2779851234 @default.
• W2017644964 hasConcept C2780957350 @default.
• W2017644964 hasConcept C2781183027 @default.
• W2017644964 hasConcept C42360764 @default.
• W2017644964 hasConcept C52859227 @default.
• W2017644964 hasConcept C544778455 @default.
• W2017644964 hasConcept C94293008 @default.
• W2017644964 hasConceptScore W2017644964C102951782 @default.
• W2017644964 hasConceptScore W2017644964C127413603 @default.
• W2017644964 hasConceptScore W2017644964C138113353 @default.
• W2017644964 hasConceptScore W2017644964C147789679 @default.
• W2017644964 hasConceptScore W2017644964C159985019 @default.
• W2017644964 hasConceptScore W2017644964C171250308 @default.
• W2017644964 hasConceptScore W2017644964C17525397 @default.
• W2017644964 hasConceptScore W2017644964C178790620 @default.
• W2017644964 hasConceptScore W2017644964C180088628 @default.
• W2017644964 hasConceptScore W2017644964C184651966 @default.
• W2017644964 hasConceptScore W2017644964C185592680 @default.
• W2017644964 hasConceptScore W2017644964C191897082 @default.
• W2017644964 hasConceptScore W2017644964C192562407 @default.
• W2017644964 hasConceptScore W2017644964C2779227376 @default.
• W2017644964 hasConceptScore W2017644964C2779851234 @default.
• W2017644964 hasConceptScore W2017644964C2780957350 @default.
• W2017644964 hasConceptScore W2017644964C2781183027 @default.
• W2017644964 hasConceptScore W2017644964C42360764 @default.
• W2017644964 hasConceptScore W2017644964C52859227 @default.
• W2017644964 hasConceptScore W2017644964C544778455 @default.
• W2017644964 hasConceptScore W2017644964C94293008 @default.
• W2017644964 hasIssue "7" @default.
• W2017644964 hasLocation W20176449641 @default.
• W2017644964 hasOpenAccess W2017644964 @default.
• W2017644964 hasPrimaryLocation W20176449641 @default.
• W2017644964 hasRelatedWork W1978447456 @default.
• W2017644964 hasRelatedWork W1995265102 @default.
• W2017644964 hasRelatedWork W2011435181 @default.
• W2017644964 hasRelatedWork W2017644964 @default.
• W2017644964 hasRelatedWork W2072988759 @default.
• W2017644964 hasRelatedWork W2076371120 @default.

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