Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017651104> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2017651104 endingPage "234" @default.
- W2017651104 startingPage "229" @default.
- W2017651104 abstract "Materials and methods for low cost minimum volume protective encapsulation of microsystems have been investigated. The focus has been on a 3D conformal multilayer coating of silicon microphones. Materials with different properties, e.g. insulating and conductive, can be applied and combined as multilayers around the sharp edges of single crystalline silicon giving a protection which can not be matched by a single material. A 50 μm thick insulating layer with volume resistivity above 1016 Ωcm with a 150 μm thick conductive layer on top is reported to have an EMI E-field damping higher than 55 dB in the 50 MHz–1 GHz frequency range." @default.
- W2017651104 created "2016-06-24" @default.
- W2017651104 creator A5015243704 @default.
- W2017651104 creator A5029477859 @default.
- W2017651104 creator A5058621148 @default.
- W2017651104 date "2001-08-01" @default.
- W2017651104 modified "2023-10-04" @default.
- W2017651104 title "Conformal coatings for 3D multichip microsystem encapsulation" @default.
- W2017651104 cites W1656084883 @default.
- W2017651104 cites W1965906489 @default.
- W2017651104 cites W1981977495 @default.
- W2017651104 cites W2003710681 @default.
- W2017651104 cites W2025494859 @default.
- W2017651104 cites W2165706125 @default.
- W2017651104 doi "https://doi.org/10.1016/s0924-4247(01)00567-2" @default.
- W2017651104 hasPublicationYear "2001" @default.
- W2017651104 type Work @default.
- W2017651104 sameAs 2017651104 @default.
- W2017651104 citedByCount "7" @default.
- W2017651104 countsByYear W20176511042016 @default.
- W2017651104 countsByYear W20176511042019 @default.
- W2017651104 crossrefType "journal-article" @default.
- W2017651104 hasAuthorship W2017651104A5015243704 @default.
- W2017651104 hasAuthorship W2017651104A5029477859 @default.
- W2017651104 hasAuthorship W2017651104A5058621148 @default.
- W2017651104 hasConcept C119599485 @default.
- W2017651104 hasConcept C127413603 @default.
- W2017651104 hasConcept C134306372 @default.
- W2017651104 hasConcept C151054161 @default.
- W2017651104 hasConcept C159985019 @default.
- W2017651104 hasConcept C171250308 @default.
- W2017651104 hasConcept C184892835 @default.
- W2017651104 hasConcept C192562407 @default.
- W2017651104 hasConcept C202374169 @default.
- W2017651104 hasConcept C24326235 @default.
- W2017651104 hasConcept C2777421745 @default.
- W2017651104 hasConcept C2781448156 @default.
- W2017651104 hasConcept C33923547 @default.
- W2017651104 hasConcept C43461449 @default.
- W2017651104 hasConcept C49040817 @default.
- W2017651104 hasConcept C544956773 @default.
- W2017651104 hasConcept C69990965 @default.
- W2017651104 hasConcept C98214594 @default.
- W2017651104 hasConceptScore W2017651104C119599485 @default.
- W2017651104 hasConceptScore W2017651104C127413603 @default.
- W2017651104 hasConceptScore W2017651104C134306372 @default.
- W2017651104 hasConceptScore W2017651104C151054161 @default.
- W2017651104 hasConceptScore W2017651104C159985019 @default.
- W2017651104 hasConceptScore W2017651104C171250308 @default.
- W2017651104 hasConceptScore W2017651104C184892835 @default.
- W2017651104 hasConceptScore W2017651104C192562407 @default.
- W2017651104 hasConceptScore W2017651104C202374169 @default.
- W2017651104 hasConceptScore W2017651104C24326235 @default.
- W2017651104 hasConceptScore W2017651104C2777421745 @default.
- W2017651104 hasConceptScore W2017651104C2781448156 @default.
- W2017651104 hasConceptScore W2017651104C33923547 @default.
- W2017651104 hasConceptScore W2017651104C43461449 @default.
- W2017651104 hasConceptScore W2017651104C49040817 @default.
- W2017651104 hasConceptScore W2017651104C544956773 @default.
- W2017651104 hasConceptScore W2017651104C69990965 @default.
- W2017651104 hasConceptScore W2017651104C98214594 @default.
- W2017651104 hasIssue "1-3" @default.
- W2017651104 hasLocation W20176511041 @default.
- W2017651104 hasOpenAccess W2017651104 @default.
- W2017651104 hasPrimaryLocation W20176511041 @default.
- W2017651104 hasRelatedWork W2082293200 @default.
- W2017651104 hasRelatedWork W2137307547 @default.
- W2017651104 hasRelatedWork W2379074999 @default.
- W2017651104 hasRelatedWork W2380293314 @default.
- W2017651104 hasRelatedWork W2805083391 @default.
- W2017651104 hasRelatedWork W2943188944 @default.
- W2017651104 hasRelatedWork W3008690834 @default.
- W2017651104 hasRelatedWork W3082440218 @default.
- W2017651104 hasRelatedWork W4242480814 @default.
- W2017651104 hasRelatedWork W4285802202 @default.
- W2017651104 hasVolume "92" @default.
- W2017651104 isParatext "false" @default.
- W2017651104 isRetracted "false" @default.
- W2017651104 magId "2017651104" @default.
- W2017651104 workType "article" @default.