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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017661434> ?p ?o ?g. }

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• W2017661434 abstract "A new plasma-enhanced chemical vapor deposition (CVD) system with an in-situ monitoring system by laser Raman spectroscopy was developed by which it is possible to obtain Raman spectra even when the thickness of a TiO2 film is only about 27.5 Å. A peak corresponding to titanium silicide was observed at the early growth stage of TiO2. It was made clear that titanium silicide decomposes with the process of growth and plays a role in the conversion of amorphous titanium dioxide to a crystalline one and enhances the growth of crystal." @default.
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• W2017661434 date "2000-06-01" @default.
• W2017661434 modified "2023-09-25" @default.
• W2017661434 title "In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy" @default.
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• W2017661434 doi "https://doi.org/10.1016/s0169-4332(00)00067-2" @default.
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