Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017698297> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2017698297 abstract "The tribological and kinetic attributes of 300-mm copper chemical mechanical planarization process were characterized in this study. Coefficient of friction (COF) ranged from 0.39 to 0.59 for the Cabot Microelectronics Corporation D100 concentrically grooved pad, indicating that boundary lubrication was the dominant tribological mechanism. In comparison, COF decreased sharply from 0.55 to 0.03 for the Dow Electronic Materials IC1000 Kgroove pad, indicating that the tribological mechanism transitioned from boundary lubrication to partial lubrication. For both pads, copper removal rate exhibited highly non-Prestonian behavior. A two-step modified Langmuir-Hinshelwood model was used to simulate copper removal rate, wafer surface reaction temperature, as well as chemical and mechanical rate constants. The simulated copper removal rates agreed very well with the experimental values. The simulated chemical rate constant to mechanical rate constant ratios indicated that the IC1000 pad generally produced a more mechanically controlled removal mechanism in this study." @default.
- W2017698297 created "2016-06-24" @default.
- W2017698297 creator A5005111526 @default.
- W2017698297 creator A5008482681 @default.
- W2017698297 creator A5010014056 @default.
- W2017698297 creator A5022255930 @default.
- W2017698297 creator A5031843438 @default.
- W2017698297 creator A5044061867 @default.
- W2017698297 creator A5046365985 @default.
- W2017698297 creator A5047432458 @default.
- W2017698297 creator A5051960956 @default.
- W2017698297 creator A5064049610 @default.
- W2017698297 date "2019-12-17" @default.
- W2017698297 modified "2023-09-22" @default.
- W2017698297 title "Tribological and Kinetic Characterization of 300-mm Copper Chemical Mechanical Planarization Process" @default.
- W2017698297 doi "https://doi.org/10.1149/1.3360679" @default.
- W2017698297 hasPublicationYear "2019" @default.
- W2017698297 type Work @default.
- W2017698297 sameAs 2017698297 @default.
- W2017698297 citedByCount "4" @default.
- W2017698297 countsByYear W20176982972018 @default.
- W2017698297 countsByYear W20176982972019 @default.
- W2017698297 countsByYear W20176982972020 @default.
- W2017698297 crossrefType "journal-article" @default.
- W2017698297 hasAuthorship W2017698297A5005111526 @default.
- W2017698297 hasAuthorship W2017698297A5008482681 @default.
- W2017698297 hasAuthorship W2017698297A5010014056 @default.
- W2017698297 hasAuthorship W2017698297A5022255930 @default.
- W2017698297 hasAuthorship W2017698297A5031843438 @default.
- W2017698297 hasAuthorship W2017698297A5044061867 @default.
- W2017698297 hasAuthorship W2017698297A5046365985 @default.
- W2017698297 hasAuthorship W2017698297A5047432458 @default.
- W2017698297 hasAuthorship W2017698297A5051960956 @default.
- W2017698297 hasAuthorship W2017698297A5064049610 @default.
- W2017698297 hasConcept C121332964 @default.
- W2017698297 hasConcept C148898269 @default.
- W2017698297 hasConcept C159985019 @default.
- W2017698297 hasConcept C160671074 @default.
- W2017698297 hasConcept C167310744 @default.
- W2017698297 hasConcept C171250308 @default.
- W2017698297 hasConcept C180088628 @default.
- W2017698297 hasConcept C184608416 @default.
- W2017698297 hasConcept C187937830 @default.
- W2017698297 hasConcept C191897082 @default.
- W2017698297 hasConcept C192562407 @default.
- W2017698297 hasConcept C2779227376 @default.
- W2017698297 hasConcept C544778455 @default.
- W2017698297 hasConcept C62520636 @default.
- W2017698297 hasConcept C93391505 @default.
- W2017698297 hasConceptScore W2017698297C121332964 @default.
- W2017698297 hasConceptScore W2017698297C148898269 @default.
- W2017698297 hasConceptScore W2017698297C159985019 @default.
- W2017698297 hasConceptScore W2017698297C160671074 @default.
- W2017698297 hasConceptScore W2017698297C167310744 @default.
- W2017698297 hasConceptScore W2017698297C171250308 @default.
- W2017698297 hasConceptScore W2017698297C180088628 @default.
- W2017698297 hasConceptScore W2017698297C184608416 @default.
- W2017698297 hasConceptScore W2017698297C187937830 @default.
- W2017698297 hasConceptScore W2017698297C191897082 @default.
- W2017698297 hasConceptScore W2017698297C192562407 @default.
- W2017698297 hasConceptScore W2017698297C2779227376 @default.
- W2017698297 hasConceptScore W2017698297C544778455 @default.
- W2017698297 hasConceptScore W2017698297C62520636 @default.
- W2017698297 hasConceptScore W2017698297C93391505 @default.
- W2017698297 hasLocation W20176982971 @default.
- W2017698297 hasOpenAccess W2017698297 @default.
- W2017698297 hasPrimaryLocation W20176982971 @default.
- W2017698297 hasRelatedWork W1965270195 @default.
- W2017698297 hasRelatedWork W2015845420 @default.
- W2017698297 hasRelatedWork W2017080436 @default.
- W2017698297 hasRelatedWork W2018563113 @default.
- W2017698297 hasRelatedWork W2030573402 @default.
- W2017698297 hasRelatedWork W2075983436 @default.
- W2017698297 hasRelatedWork W2081864690 @default.
- W2017698297 hasRelatedWork W2135578409 @default.
- W2017698297 hasRelatedWork W2159530743 @default.
- W2017698297 hasRelatedWork W2358516828 @default.
- W2017698297 hasRelatedWork W2385976218 @default.
- W2017698297 hasRelatedWork W2795467520 @default.
- W2017698297 hasRelatedWork W2798064595 @default.
- W2017698297 hasRelatedWork W2799319530 @default.
- W2017698297 hasRelatedWork W2805933381 @default.
- W2017698297 hasRelatedWork W2896927867 @default.
- W2017698297 hasRelatedWork W3007826833 @default.
- W2017698297 hasRelatedWork W3162053998 @default.
- W2017698297 hasRelatedWork W3208881724 @default.
- W2017698297 hasRelatedWork W925597583 @default.
- W2017698297 isParatext "false" @default.
- W2017698297 isRetracted "false" @default.
- W2017698297 magId "2017698297" @default.
- W2017698297 workType "article" @default.