Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017707213> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2017707213 endingPage "15" @default.
- W2017707213 startingPage "1" @default.
- W2017707213 abstract "We have developed a new three-dimensional stacking technology using the wafer-to-wafer stacked method. Electrical conductivity between each wafer is almost 100% and contact resistance is less than 0.7Ω between a through-silicon via (TSV) and a microbump. We have also created a prototype of a three-layer stacking device using our technology, where each wafer for the stacking is fabricated by using 0.18um CMOS technology based on 8-inch wafers. The device is operated by two times the frequency of the multichip module (MCM) device case using a two-dimensional device with identical functions and minimally different power consumption. The yields obtained from the results comprising all functional tests are over 60%." @default.
- W2017707213 created "2016-06-24" @default.
- W2017707213 creator A5004873271 @default.
- W2017707213 creator A5020541244 @default.
- W2017707213 creator A5036049258 @default.
- W2017707213 creator A5062400897 @default.
- W2017707213 creator A5071119235 @default.
- W2017707213 creator A5076040559 @default.
- W2017707213 creator A5084722525 @default.
- W2017707213 date "2008-10-01" @default.
- W2017707213 modified "2023-10-18" @default.
- W2017707213 title "Multilayer stacking technology using wafer-to-wafer stacked method" @default.
- W2017707213 cites W1987131925 @default.
- W2017707213 cites W2009195513 @default.
- W2017707213 cites W2164231539 @default.
- W2017707213 doi "https://doi.org/10.1145/1412587.1412593" @default.
- W2017707213 hasPublicationYear "2008" @default.
- W2017707213 type Work @default.
- W2017707213 sameAs 2017707213 @default.
- W2017707213 citedByCount "22" @default.
- W2017707213 countsByYear W20177072132012 @default.
- W2017707213 countsByYear W20177072132013 @default.
- W2017707213 countsByYear W20177072132015 @default.
- W2017707213 countsByYear W20177072132016 @default.
- W2017707213 countsByYear W20177072132017 @default.
- W2017707213 countsByYear W20177072132018 @default.
- W2017707213 countsByYear W20177072132020 @default.
- W2017707213 countsByYear W20177072132022 @default.
- W2017707213 crossrefType "journal-article" @default.
- W2017707213 hasAuthorship W2017707213A5004873271 @default.
- W2017707213 hasAuthorship W2017707213A5020541244 @default.
- W2017707213 hasAuthorship W2017707213A5036049258 @default.
- W2017707213 hasAuthorship W2017707213A5062400897 @default.
- W2017707213 hasAuthorship W2017707213A5071119235 @default.
- W2017707213 hasAuthorship W2017707213A5076040559 @default.
- W2017707213 hasAuthorship W2017707213A5084722525 @default.
- W2017707213 hasConcept C127413603 @default.
- W2017707213 hasConcept C160671074 @default.
- W2017707213 hasConcept C171250308 @default.
- W2017707213 hasConcept C178790620 @default.
- W2017707213 hasConcept C185592680 @default.
- W2017707213 hasConcept C192562407 @default.
- W2017707213 hasConcept C24326235 @default.
- W2017707213 hasConcept C2779227376 @default.
- W2017707213 hasConcept C2780288131 @default.
- W2017707213 hasConcept C33347731 @default.
- W2017707213 hasConcept C46362747 @default.
- W2017707213 hasConcept C49040817 @default.
- W2017707213 hasConceptScore W2017707213C127413603 @default.
- W2017707213 hasConceptScore W2017707213C160671074 @default.
- W2017707213 hasConceptScore W2017707213C171250308 @default.
- W2017707213 hasConceptScore W2017707213C178790620 @default.
- W2017707213 hasConceptScore W2017707213C185592680 @default.
- W2017707213 hasConceptScore W2017707213C192562407 @default.
- W2017707213 hasConceptScore W2017707213C24326235 @default.
- W2017707213 hasConceptScore W2017707213C2779227376 @default.
- W2017707213 hasConceptScore W2017707213C2780288131 @default.
- W2017707213 hasConceptScore W2017707213C33347731 @default.
- W2017707213 hasConceptScore W2017707213C46362747 @default.
- W2017707213 hasConceptScore W2017707213C49040817 @default.
- W2017707213 hasIssue "4" @default.
- W2017707213 hasLocation W20177072131 @default.
- W2017707213 hasOpenAccess W2017707213 @default.
- W2017707213 hasPrimaryLocation W20177072131 @default.
- W2017707213 hasRelatedWork W1969570385 @default.
- W2017707213 hasRelatedWork W2017707213 @default.
- W2017707213 hasRelatedWork W2036313051 @default.
- W2017707213 hasRelatedWork W2070188681 @default.
- W2017707213 hasRelatedWork W2146366317 @default.
- W2017707213 hasRelatedWork W2157994855 @default.
- W2017707213 hasRelatedWork W2164231539 @default.
- W2017707213 hasRelatedWork W2540312267 @default.
- W2017707213 hasRelatedWork W2970498257 @default.
- W2017707213 hasRelatedWork W3066247946 @default.
- W2017707213 hasVolume "4" @default.
- W2017707213 isParatext "false" @default.
- W2017707213 isRetracted "false" @default.
- W2017707213 magId "2017707213" @default.
- W2017707213 workType "article" @default.