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- W2017711906 endingPage "012016" @default.
- W2017711906 startingPage "012016" @default.
- W2017711906 abstract "Plasma Enhanced Vapour Deposition (PECVD) is used to elaborate silicon nanoparticles (np-Si) embedded in silicon nitride (Si3N4) layers. The samples have been produced for various NH3 flows. The np-Si dielectric function (DF) have been determined by spectroscopic ellipsometry (SE) in the wavelength range from 210 nm to 880 nm. Thanks to ellipsometric modeling it has been possible to study the np-Si physical properties." @default.
- W2017711906 created "2016-06-24" @default.
- W2017711906 creator A5001073517 @default.
- W2017711906 creator A5011501172 @default.
- W2017711906 creator A5019905055 @default.
- W2017711906 creator A5020363082 @default.
- W2017711906 creator A5053620832 @default.
- W2017711906 creator A5072168055 @default.
- W2017711906 date "2009-11-01" @default.
- W2017711906 modified "2023-10-17" @default.
- W2017711906 title "Spectroscopic ellipsometry characterization of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix" @default.
- W2017711906 cites W1590429422 @default.
- W2017711906 cites W1631089133 @default.
- W2017711906 cites W1979189261 @default.
- W2017711906 cites W1981247648 @default.
- W2017711906 cites W1999601950 @default.
- W2017711906 cites W2002250452 @default.
- W2017711906 cites W2050287423 @default.
- W2017711906 cites W2058422705 @default.
- W2017711906 cites W2071601794 @default.
- W2017711906 cites W2077412456 @default.
- W2017711906 cites W2098244965 @default.
- W2017711906 doi "https://doi.org/10.1088/1757-899x/6/1/012016" @default.
- W2017711906 hasPublicationYear "2009" @default.
- W2017711906 type Work @default.
- W2017711906 sameAs 2017711906 @default.
- W2017711906 citedByCount "0" @default.
- W2017711906 crossrefType "journal-article" @default.
- W2017711906 hasAuthorship W2017711906A5001073517 @default.
- W2017711906 hasAuthorship W2017711906A5011501172 @default.
- W2017711906 hasAuthorship W2017711906A5019905055 @default.
- W2017711906 hasAuthorship W2017711906A5020363082 @default.
- W2017711906 hasAuthorship W2017711906A5053620832 @default.
- W2017711906 hasAuthorship W2017711906A5072168055 @default.
- W2017711906 hasConcept C106487976 @default.
- W2017711906 hasConcept C127413603 @default.
- W2017711906 hasConcept C155672457 @default.
- W2017711906 hasConcept C159985019 @default.
- W2017711906 hasConcept C171250308 @default.
- W2017711906 hasConcept C18293161 @default.
- W2017711906 hasConcept C19067145 @default.
- W2017711906 hasConcept C192562407 @default.
- W2017711906 hasConcept C2777431650 @default.
- W2017711906 hasConcept C2780841128 @default.
- W2017711906 hasConcept C41008148 @default.
- W2017711906 hasConcept C42360764 @default.
- W2017711906 hasConcept C44838205 @default.
- W2017711906 hasConcept C49040817 @default.
- W2017711906 hasConcept C544956773 @default.
- W2017711906 hasConcept C76155785 @default.
- W2017711906 hasConceptScore W2017711906C106487976 @default.
- W2017711906 hasConceptScore W2017711906C127413603 @default.
- W2017711906 hasConceptScore W2017711906C155672457 @default.
- W2017711906 hasConceptScore W2017711906C159985019 @default.
- W2017711906 hasConceptScore W2017711906C171250308 @default.
- W2017711906 hasConceptScore W2017711906C18293161 @default.
- W2017711906 hasConceptScore W2017711906C19067145 @default.
- W2017711906 hasConceptScore W2017711906C192562407 @default.
- W2017711906 hasConceptScore W2017711906C2777431650 @default.
- W2017711906 hasConceptScore W2017711906C2780841128 @default.
- W2017711906 hasConceptScore W2017711906C41008148 @default.
- W2017711906 hasConceptScore W2017711906C42360764 @default.
- W2017711906 hasConceptScore W2017711906C44838205 @default.
- W2017711906 hasConceptScore W2017711906C49040817 @default.
- W2017711906 hasConceptScore W2017711906C544956773 @default.
- W2017711906 hasConceptScore W2017711906C76155785 @default.
- W2017711906 hasLocation W20177119061 @default.
- W2017711906 hasLocation W20177119062 @default.
- W2017711906 hasLocation W20177119063 @default.
- W2017711906 hasLocation W20177119064 @default.
- W2017711906 hasLocation W20177119065 @default.
- W2017711906 hasOpenAccess W2017711906 @default.
- W2017711906 hasPrimaryLocation W20177119061 @default.
- W2017711906 hasRelatedWork W2002125179 @default.
- W2017711906 hasRelatedWork W2056538785 @default.
- W2017711906 hasRelatedWork W2081069970 @default.
- W2017711906 hasRelatedWork W2737498735 @default.
- W2017711906 hasRelatedWork W3012559914 @default.
- W2017711906 hasRelatedWork W3207861065 @default.
- W2017711906 hasRelatedWork W4243387708 @default.
- W2017711906 hasRelatedWork W4249938786 @default.
- W2017711906 hasRelatedWork W4252217798 @default.
- W2017711906 hasRelatedWork W4362557324 @default.
- W2017711906 hasVolume "6" @default.
- W2017711906 isParatext "false" @default.
- W2017711906 isRetracted "false" @default.
- W2017711906 magId "2017711906" @default.
- W2017711906 workType "article" @default.