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- W2017725617 abstract "In the semiconductor equipment business, self-metrology calls for in-situ measurements and diagnostics of the process parameters. For exposure tools, self-diagnostics and self-tuning are the core features. The present paper discusses a dose control system that allows for monitoring, correction and periodic self-calibration of the litho tool. Creation of such a system becomes a task even more complex in view of the aggressive illumination environment - 193 and 157 nm - that makes most traditional optical materials inapplicable; and causes many that are applicable to have time-varying performance." @default.
- W2017725617 created "2016-06-24" @default.
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- W2017725617 date "2000-07-05" @default.
- W2017725617 modified "2023-09-23" @default.
- W2017725617 title "Self-sustaining dose control system: ways to improve the exposure process" @default.
- W2017725617 doi "https://doi.org/10.1117/12.389077" @default.
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