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- W2017768008 abstract "For the purpose of surface and buried interface structural analysis, we have developed a medium-energy (∼ 100 keV) ion scattering (MEIS) spectrometer with a time-of-flight (TOF) energy analyzer that can detect scattered ions and neutrals separately at a scattering angle of 180°. One of the reasons to use the TOF analyzer rather than an electrostatic one is to avoid the ambiguity in the ion neutralization probability. Indeed, we have found that the neutralization probability of 100 keV He+ ions backscattered from a Si(001) sample exhibits remarkable angular variations." @default.
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- W2017768008 date "1996-09-01" @default.
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- W2017768008 title "Separation of scattered ions and neutrals in medium-energy ion scattering spectroscopy" @default.
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- W2017768008 doi "https://doi.org/10.1016/0168-583x(95)01484-5" @default.
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