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• W2017788503 abstract "Abstract The recrystallization characteristics of polycrystalline silicon (poly-Si) films amorphized by germanium ion (Ge + ) implantation on a SiO 2 layer are studied by TEM analysis, and the possibility of enlarging the final grain size is investigated. Also, the characteristics of Ge + implanted films with phosphorus doping are reported and discussed. The nucleation and growth rates of undoped Ge + implanted films are lower and higher, respectively, than those of silicon ion (Si + ) implanted films, so that the former films achieve grain sizes about 2–3 times larger than the latter films, depending on annealing temperature. Phosphorus doping in Ge + implanted films effectively enhances the grain size, because of the retardation of random nucleation and the enhancement of grain growth. An average grain size of 12 μm is obtained in doped Ge + implanted films with a phosphorus concentration of 1 × 10 20 ions/cm 3 after annealing at 650°C for 5 h, which is about four times larger than that in undoped Ge + implanted films." @default.
• W2017788503 created "2016-06-24" @default.
• W2017788503 creator A5046185207 @default.
• W2017788503 creator A5075841872 @default.
• W2017788503 creator A5079598835 @default.
• W2017788503 creator A5079669870 @default.
• W2017788503 date "1995-02-01" @default.
• W2017788503 modified "2023-10-02" @default.
• W2017788503 title "Recystallization characteristics of polycrystalline silicon films amorphized by germanium ion implantation" @default.
• W2017788503 cites W1492476048 @default.
• W2017788503 cites W1963621271 @default.
• W2017788503 cites W1964093528 @default.
• W2017788503 cites W1967658254 @default.
• W2017788503 cites W1971517452 @default.
• W2017788503 cites W1977313475 @default.
• W2017788503 cites W2000830133 @default.
• W2017788503 cites W2074209103 @default.
• W2017788503 cites W2075960306 @default.
• W2017788503 doi "https://doi.org/10.1016/0038-1101(94)00112-s" @default.
• W2017788503 hasPublicationYear "1995" @default.
• W2017788503 type Work @default.
• W2017788503 sameAs 2017788503 @default.
• W2017788503 citedByCount "12" @default.
• W2017788503 countsByYear W20177885032014 @default.
• W2017788503 crossrefType "journal-article" @default.
• W2017788503 hasAuthorship W2017788503A5046185207 @default.
• W2017788503 hasAuthorship W2017788503A5075841872 @default.
• W2017788503 hasAuthorship W2017788503A5079598835 @default.
• W2017788503 hasAuthorship W2017788503A5079669870 @default.
• W2017788503 hasConcept C113196181 @default.
• W2017788503 hasConcept C137637335 @default.
• W2017788503 hasConcept C145148216 @default.
• W2017788503 hasConcept C151730666 @default.
• W2017788503 hasConcept C171250308 @default.
• W2017788503 hasConcept C178790620 @default.
• W2017788503 hasConcept C185592680 @default.
• W2017788503 hasConcept C191897082 @default.
• W2017788503 hasConcept C192191005 @default.
• W2017788503 hasConcept C192562407 @default.
• W2017788503 hasConcept C195702682 @default.
• W2017788503 hasConcept C2777855556 @default.
• W2017788503 hasConcept C2779227376 @default.
• W2017788503 hasConcept C2780565262 @default.
• W2017788503 hasConcept C41823505 @default.
• W2017788503 hasConcept C43617362 @default.
• W2017788503 hasConcept C49040817 @default.
• W2017788503 hasConcept C544956773 @default.
• W2017788503 hasConcept C550623735 @default.
• W2017788503 hasConcept C57863236 @default.
• W2017788503 hasConcept C61048295 @default.
• W2017788503 hasConcept C8010536 @default.
• W2017788503 hasConcept C86803240 @default.
• W2017788503 hasConcept C87359718 @default.
• W2017788503 hasConcept C98390173 @default.
• W2017788503 hasConceptScore W2017788503C113196181 @default.
• W2017788503 hasConceptScore W2017788503C137637335 @default.
• W2017788503 hasConceptScore W2017788503C145148216 @default.
• W2017788503 hasConceptScore W2017788503C151730666 @default.
• W2017788503 hasConceptScore W2017788503C171250308 @default.
• W2017788503 hasConceptScore W2017788503C178790620 @default.
• W2017788503 hasConceptScore W2017788503C185592680 @default.
• W2017788503 hasConceptScore W2017788503C191897082 @default.
• W2017788503 hasConceptScore W2017788503C192191005 @default.
• W2017788503 hasConceptScore W2017788503C192562407 @default.
• W2017788503 hasConceptScore W2017788503C195702682 @default.
• W2017788503 hasConceptScore W2017788503C2777855556 @default.
• W2017788503 hasConceptScore W2017788503C2779227376 @default.
• W2017788503 hasConceptScore W2017788503C2780565262 @default.
• W2017788503 hasConceptScore W2017788503C41823505 @default.
• W2017788503 hasConceptScore W2017788503C43617362 @default.
• W2017788503 hasConceptScore W2017788503C49040817 @default.
• W2017788503 hasConceptScore W2017788503C544956773 @default.
• W2017788503 hasConceptScore W2017788503C550623735 @default.
• W2017788503 hasConceptScore W2017788503C57863236 @default.
• W2017788503 hasConceptScore W2017788503C61048295 @default.
• W2017788503 hasConceptScore W2017788503C8010536 @default.
• W2017788503 hasConceptScore W2017788503C86803240 @default.
• W2017788503 hasConceptScore W2017788503C87359718 @default.
• W2017788503 hasConceptScore W2017788503C98390173 @default.
• W2017788503 hasLocation W20177885031 @default.
• W2017788503 hasOpenAccess W2017788503 @default.
• W2017788503 hasPrimaryLocation W20177885031 @default.
• W2017788503 hasRelatedWork W1615653583 @default.
• W2017788503 hasRelatedWork W1965138194 @default.
• W2017788503 hasRelatedWork W1981785863 @default.
• W2017788503 hasRelatedWork W1984480030 @default.
• W2017788503 hasRelatedWork W1984840236 @default.
• W2017788503 hasRelatedWork W1985392902 @default.
• W2017788503 hasRelatedWork W1997663139 @default.
• W2017788503 hasRelatedWork W2002164061 @default.
• W2017788503 hasRelatedWork W2014027547 @default.
• W2017788503 hasRelatedWork W2017114659 @default.
• W2017788503 hasRelatedWork W2042151448 @default.
• W2017788503 hasRelatedWork W2044238983 @default.
• W2017788503 hasRelatedWork W2045531879 @default.
• W2017788503 hasRelatedWork W2056371321 @default.
• W2017788503 hasRelatedWork W2057658854 @default.
• W2017788503 hasRelatedWork W2070678850 @default.
• W2017788503 hasRelatedWork W2077132076 @default.
• W2017788503 hasRelatedWork W2078533527 @default.

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