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- W2017789684 abstract "We report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth." @default.
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- W2017789684 date "2009-10-20" @default.
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- W2017789684 title "Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser" @default.
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