Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017795035> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2017795035 endingPage "045303" @default.
- W2017795035 startingPage "045303" @default.
- W2017795035 abstract "Potassium hydroxide (KOH) etching of a patterned [100] oriented silicon wafer produces V-shaped etch pits. We demonstrate that the remaining thickness of silicon at the tip of the etch pit can be reduced to approximately 5 microm using an appropriately sized etch mask and optical feedback. Starting from such an etched chip, we have developed two different routes for fabricating 100 nm scale slits that penetrate through the macroscopic silicon chip (the slits are approximately 850 microm wide at one face of the chip and gradually narrow to approximately 100-200 nm wide at the opposite face of the chip). In the first process, the etched chips are sonicated to break the thin silicon at the tip of the etch pit and then further KOH etched to form a narrow slit. In the second process, focused ion beam milling is used to etch through the thin silicon at the tip of the etch pit. The first method has the advantage that it uses only low-resolution technology while the second method offers more control over the length and width of the slit. Our slits can be used for preparing mechanically stable, transmission electron microscopy samples compatible with electrical transport measurements or as nanostencils for depositing nanowires seamlessly connected to their contact pads." @default.
- W2017795035 created "2016-06-24" @default.
- W2017795035 creator A5006441877 @default.
- W2017795035 creator A5007582363 @default.
- W2017795035 creator A5052817615 @default.
- W2017795035 date "2008-12-18" @default.
- W2017795035 modified "2023-09-27" @default.
- W2017795035 title "Nanoslits in silicon chips" @default.
- W2017795035 cites W1636112032 @default.
- W2017795035 cites W1963787561 @default.
- W2017795035 cites W1964428883 @default.
- W2017795035 cites W1967015305 @default.
- W2017795035 cites W1969856338 @default.
- W2017795035 cites W1969958615 @default.
- W2017795035 cites W1974591393 @default.
- W2017795035 cites W1977240015 @default.
- W2017795035 cites W1983783434 @default.
- W2017795035 cites W1995564989 @default.
- W2017795035 cites W2000958269 @default.
- W2017795035 cites W2013001330 @default.
- W2017795035 cites W2015677277 @default.
- W2017795035 cites W2015702785 @default.
- W2017795035 cites W2020045825 @default.
- W2017795035 cites W2030850536 @default.
- W2017795035 cites W2044696410 @default.
- W2017795035 cites W2047915532 @default.
- W2017795035 cites W2050132318 @default.
- W2017795035 cites W2061570401 @default.
- W2017795035 cites W2083469461 @default.
- W2017795035 cites W2084982725 @default.
- W2017795035 cites W2095215057 @default.
- W2017795035 cites W2101262918 @default.
- W2017795035 cites W2102293129 @default.
- W2017795035 cites W2143735096 @default.
- W2017795035 cites W2153563966 @default.
- W2017795035 cites W2160912415 @default.
- W2017795035 cites W3105111701 @default.
- W2017795035 cites W4254531944 @default.
- W2017795035 doi "https://doi.org/10.1088/0957-4484/20/4/045303" @default.
- W2017795035 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19417315" @default.
- W2017795035 hasPublicationYear "2008" @default.
- W2017795035 type Work @default.
- W2017795035 sameAs 2017795035 @default.
- W2017795035 citedByCount "2" @default.
- W2017795035 crossrefType "journal-article" @default.
- W2017795035 hasAuthorship W2017795035A5006441877 @default.
- W2017795035 hasAuthorship W2017795035A5007582363 @default.
- W2017795035 hasAuthorship W2017795035A5052817615 @default.
- W2017795035 hasConcept C100460472 @default.
- W2017795035 hasConcept C119599485 @default.
- W2017795035 hasConcept C127413603 @default.
- W2017795035 hasConcept C160671074 @default.
- W2017795035 hasConcept C165005293 @default.
- W2017795035 hasConcept C171250308 @default.
- W2017795035 hasConcept C178790620 @default.
- W2017795035 hasConcept C185592680 @default.
- W2017795035 hasConcept C192562407 @default.
- W2017795035 hasConcept C2779227376 @default.
- W2017795035 hasConcept C2779439175 @default.
- W2017795035 hasConcept C49040817 @default.
- W2017795035 hasConcept C544956773 @default.
- W2017795035 hasConceptScore W2017795035C100460472 @default.
- W2017795035 hasConceptScore W2017795035C119599485 @default.
- W2017795035 hasConceptScore W2017795035C127413603 @default.
- W2017795035 hasConceptScore W2017795035C160671074 @default.
- W2017795035 hasConceptScore W2017795035C165005293 @default.
- W2017795035 hasConceptScore W2017795035C171250308 @default.
- W2017795035 hasConceptScore W2017795035C178790620 @default.
- W2017795035 hasConceptScore W2017795035C185592680 @default.
- W2017795035 hasConceptScore W2017795035C192562407 @default.
- W2017795035 hasConceptScore W2017795035C2779227376 @default.
- W2017795035 hasConceptScore W2017795035C2779439175 @default.
- W2017795035 hasConceptScore W2017795035C49040817 @default.
- W2017795035 hasConceptScore W2017795035C544956773 @default.
- W2017795035 hasIssue "4" @default.
- W2017795035 hasLocation W20177950351 @default.
- W2017795035 hasLocation W20177950352 @default.
- W2017795035 hasOpenAccess W2017795035 @default.
- W2017795035 hasPrimaryLocation W20177950351 @default.
- W2017795035 hasRelatedWork W1969379218 @default.
- W2017795035 hasRelatedWork W1972416291 @default.
- W2017795035 hasRelatedWork W1989365707 @default.
- W2017795035 hasRelatedWork W2040990292 @default.
- W2017795035 hasRelatedWork W2135105783 @default.
- W2017795035 hasRelatedWork W2164353131 @default.
- W2017795035 hasRelatedWork W2903101056 @default.
- W2017795035 hasRelatedWork W2942662716 @default.
- W2017795035 hasRelatedWork W4381745617 @default.
- W2017795035 hasRelatedWork W1967716802 @default.
- W2017795035 hasVolume "20" @default.
- W2017795035 isParatext "false" @default.
- W2017795035 isRetracted "false" @default.
- W2017795035 magId "2017795035" @default.
- W2017795035 workType "article" @default.