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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017874058> ?p ?o ?g. }

• W2017874058 endingPage "250" @default.
• W2017874058 startingPage "244" @default.
• W2017874058 abstract "A study was performed on the rf sputtering plasma of pure cobalt and gadolinium metals and of Gd <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>26</sub> Co <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>74</sub> alloy using optical emission spectroscopy (OES), for various discharge conditions such as the argon pressure P <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Ar</sub> , target voltage V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>rf</sub> , and substrate bias voltage V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>b</sub> . From measurements of OES line intensities and deposition rates for various values of P <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Ar</sub> , V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>rf</sub> and the focussing field H, it was found that the line intensities of both Co and Gd atoms are represented as linear or square functions of the atomic densities in the plasma. Moreover, the preferential resputtering effect of Gd atoms was also confirmed from the change in line intensity for a negative bias voltage with V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>b</sub> ≧20 V." @default.
• W2017874058 created "2016-06-24" @default.
• W2017874058 creator A5017391006 @default.
• W2017874058 creator A5018656347 @default.
• W2017874058 creator A5055211178 @default.
• W2017874058 creator A5077172159 @default.
• W2017874058 date "1989-04-01" @default.
• W2017874058 modified "2023-09-23" @default.
• W2017874058 title "Optical Emission Spectroscopy from rf Sputtering Plasma of Gd-Co Alloy" @default.
• W2017874058 cites W2149206203 @default.
• W2017874058 doi "https://doi.org/10.1109/tjmj.1989.4564221" @default.
• W2017874058 hasPublicationYear "1989" @default.
• W2017874058 type Work @default.
• W2017874058 sameAs 2017874058 @default.
• W2017874058 citedByCount "1" @default.
• W2017874058 crossrefType "journal-article" @default.
• W2017874058 hasAuthorship W2017874058A5017391006 @default.
• W2017874058 hasAuthorship W2017874058A5018656347 @default.
• W2017874058 hasAuthorship W2017874058A5055211178 @default.
• W2017874058 hasAuthorship W2017874058A5077172159 @default.
• W2017874058 hasConcept C113196181 @default.
• W2017874058 hasConcept C121332964 @default.
• W2017874058 hasConcept C1276947 @default.
• W2017874058 hasConcept C165801399 @default.
• W2017874058 hasConcept C171250308 @default.
• W2017874058 hasConcept C184779094 @default.
• W2017874058 hasConcept C185592680 @default.
• W2017874058 hasConcept C19067145 @default.
• W2017874058 hasConcept C191897082 @default.
• W2017874058 hasConcept C192562407 @default.
• W2017874058 hasConcept C20254490 @default.
• W2017874058 hasConcept C22423302 @default.
• W2017874058 hasConcept C2780026712 @default.
• W2017874058 hasConcept C32891209 @default.
• W2017874058 hasConcept C43617362 @default.
• W2017874058 hasConcept C4839761 @default.
• W2017874058 hasConcept C515602321 @default.
• W2017874058 hasConcept C547737533 @default.
• W2017874058 hasConcept C557651011 @default.
• W2017874058 hasConcept C61427134 @default.
• W2017874058 hasConcept C62520636 @default.
• W2017874058 hasConcept C82706917 @default.
• W2017874058 hasConcept C96141758 @default.
• W2017874058 hasConceptScore W2017874058C113196181 @default.
• W2017874058 hasConceptScore W2017874058C121332964 @default.
• W2017874058 hasConceptScore W2017874058C1276947 @default.
• W2017874058 hasConceptScore W2017874058C165801399 @default.
• W2017874058 hasConceptScore W2017874058C171250308 @default.
• W2017874058 hasConceptScore W2017874058C184779094 @default.
• W2017874058 hasConceptScore W2017874058C185592680 @default.
• W2017874058 hasConceptScore W2017874058C19067145 @default.
• W2017874058 hasConceptScore W2017874058C191897082 @default.
• W2017874058 hasConceptScore W2017874058C192562407 @default.
• W2017874058 hasConceptScore W2017874058C20254490 @default.
• W2017874058 hasConceptScore W2017874058C22423302 @default.
• W2017874058 hasConceptScore W2017874058C2780026712 @default.
• W2017874058 hasConceptScore W2017874058C32891209 @default.
• W2017874058 hasConceptScore W2017874058C43617362 @default.
• W2017874058 hasConceptScore W2017874058C4839761 @default.
• W2017874058 hasConceptScore W2017874058C515602321 @default.
• W2017874058 hasConceptScore W2017874058C547737533 @default.
• W2017874058 hasConceptScore W2017874058C557651011 @default.
• W2017874058 hasConceptScore W2017874058C61427134 @default.
• W2017874058 hasConceptScore W2017874058C62520636 @default.
• W2017874058 hasConceptScore W2017874058C82706917 @default.
• W2017874058 hasConceptScore W2017874058C96141758 @default.
• W2017874058 hasIssue "4" @default.
• W2017874058 hasLocation W20178740581 @default.
• W2017874058 hasOpenAccess W2017874058 @default.
• W2017874058 hasPrimaryLocation W20178740581 @default.
• W2017874058 hasRelatedWork W1974447498 @default.
• W2017874058 hasRelatedWork W1999573645 @default.
• W2017874058 hasRelatedWork W2019366120 @default.
• W2017874058 hasRelatedWork W2029349634 @default.
• W2017874058 hasRelatedWork W2037772824 @default.
• W2017874058 hasRelatedWork W2052528477 @default.
• W2017874058 hasRelatedWork W2064401183 @default.
• W2017874058 hasRelatedWork W2076865087 @default.
• W2017874058 hasRelatedWork W2082724478 @default.
• W2017874058 hasRelatedWork W2082877083 @default.
• W2017874058 hasRelatedWork W2093774430 @default.
• W2017874058 hasRelatedWork W2155953074 @default.
• W2017874058 hasRelatedWork W2170816114 @default.
• W2017874058 hasRelatedWork W2525356965 @default.
• W2017874058 hasRelatedWork W2552821322 @default.
• W2017874058 hasRelatedWork W2593417970 @default.
• W2017874058 hasRelatedWork W2594931990 @default.
• W2017874058 hasRelatedWork W3040060203 @default.
• W2017874058 hasRelatedWork W2153211302 @default.
• W2017874058 hasRelatedWork W2178750705 @default.
• W2017874058 hasVolume "4" @default.
• W2017874058 isParatext "false" @default.
• W2017874058 isRetracted "false" @default.
• W2017874058 magId "2017874058" @default.
• W2017874058 workType "article" @default.