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- W2017890671 abstract "Scatterometry is one of the few metrology candidates that has true potential to analyse submicrometer critical dimension (CD). This physical constraint restricts initially the scalar theory of diffraction (Kirchhoff, Fraunhofer), where no computation is needed, to describe pattern with such characteristics. Now many techniques based in a rigourous analysis of diffraction (were polarisation is considered) are developped (RCWA), however these vector theory would be difficult to apply in real time due to time consuming by computation. For that reason, we push here scattering measurement of isolated lines, in the limit of the scalar theory. We use the scattering mode of SOPRA's GESP 5 instrument, which measure separately TE and TM polarisations." @default.
- W2017890671 created "2016-06-24" @default.
- W2017890671 creator A5004428447 @default.
- W2017890671 creator A5021864361 @default.
- W2017890671 creator A5031796354 @default.
- W2017890671 creator A5062976622 @default.
- W2017890671 creator A5088868713 @default.
- W2017890671 date "2006-03-10" @default.
- W2017890671 modified "2023-09-25" @default.
- W2017890671 title "Spectroscopic polarized scatterometry applied to single-line profiling" @default.
- W2017890671 doi "https://doi.org/10.1117/12.657431" @default.
- W2017890671 hasPublicationYear "2006" @default.
- W2017890671 type Work @default.
- W2017890671 sameAs 2017890671 @default.
- W2017890671 citedByCount "0" @default.
- W2017890671 crossrefType "proceedings-article" @default.
- W2017890671 hasAuthorship W2017890671A5004428447 @default.
- W2017890671 hasAuthorship W2017890671A5021864361 @default.
- W2017890671 hasAuthorship W2017890671A5031796354 @default.
- W2017890671 hasAuthorship W2017890671A5062976622 @default.
- W2017890671 hasAuthorship W2017890671A5088868713 @default.
- W2017890671 hasConcept C11413529 @default.
- W2017890671 hasConcept C120665830 @default.
- W2017890671 hasConcept C121332964 @default.
- W2017890671 hasConcept C191486275 @default.
- W2017890671 hasConcept C195766429 @default.
- W2017890671 hasConcept C207114421 @default.
- W2017890671 hasConcept C2524010 @default.
- W2017890671 hasConcept C30475298 @default.
- W2017890671 hasConcept C33923547 @default.
- W2017890671 hasConcept C41008148 @default.
- W2017890671 hasConcept C45374587 @default.
- W2017890671 hasConcept C57691317 @default.
- W2017890671 hasConceptScore W2017890671C11413529 @default.
- W2017890671 hasConceptScore W2017890671C120665830 @default.
- W2017890671 hasConceptScore W2017890671C121332964 @default.
- W2017890671 hasConceptScore W2017890671C191486275 @default.
- W2017890671 hasConceptScore W2017890671C195766429 @default.
- W2017890671 hasConceptScore W2017890671C207114421 @default.
- W2017890671 hasConceptScore W2017890671C2524010 @default.
- W2017890671 hasConceptScore W2017890671C30475298 @default.
- W2017890671 hasConceptScore W2017890671C33923547 @default.
- W2017890671 hasConceptScore W2017890671C41008148 @default.
- W2017890671 hasConceptScore W2017890671C45374587 @default.
- W2017890671 hasConceptScore W2017890671C57691317 @default.
- W2017890671 hasLocation W20178906711 @default.
- W2017890671 hasOpenAccess W2017890671 @default.
- W2017890671 hasPrimaryLocation W20178906711 @default.
- W2017890671 hasRelatedWork W1999070981 @default.
- W2017890671 hasRelatedWork W2000096409 @default.
- W2017890671 hasRelatedWork W2012534794 @default.
- W2017890671 hasRelatedWork W2041473487 @default.
- W2017890671 hasRelatedWork W2064688571 @default.
- W2017890671 hasRelatedWork W2072804922 @default.
- W2017890671 hasRelatedWork W2093125817 @default.
- W2017890671 hasRelatedWork W2540392658 @default.
- W2017890671 hasRelatedWork W3177303386 @default.
- W2017890671 hasRelatedWork W4205396863 @default.
- W2017890671 isParatext "false" @default.
- W2017890671 isRetracted "false" @default.
- W2017890671 magId "2017890671" @default.
- W2017890671 workType "article" @default.