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- W2017943259 abstract "The comb actuator deformed by microloading effect in DRIE process generally has í«Lí» shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to explain the driving characteristics. For modeling convenience, the damaged comb electrode is assumed to be a simple í«Lí» shape. According to the modeling, the resonant frequency is estimated to increase as the bias voltage increases. The static displacement curve shows í«Sí» shape." @default.
- W2017943259 created "2016-06-24" @default.
- W2017943259 creator A5000070929 @default.
- W2017943259 creator A5044861063 @default.
- W2017943259 creator A5046035419 @default.
- W2017943259 creator A5083760530 @default.
- W2017943259 creator A5087653122 @default.
- W2017943259 date "2001-09-28" @default.
- W2017943259 modified "2023-09-23" @default.
- W2017943259 title "<title>Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching</title>" @default.
- W2017943259 doi "https://doi.org/10.1117/12.442952" @default.
- W2017943259 hasPublicationYear "2001" @default.
- W2017943259 type Work @default.
- W2017943259 sameAs 2017943259 @default.
- W2017943259 citedByCount "0" @default.
- W2017943259 crossrefType "proceedings-article" @default.
- W2017943259 hasAuthorship W2017943259A5000070929 @default.
- W2017943259 hasAuthorship W2017943259A5044861063 @default.
- W2017943259 hasAuthorship W2017943259A5046035419 @default.
- W2017943259 hasAuthorship W2017943259A5083760530 @default.
- W2017943259 hasAuthorship W2017943259A5087653122 @default.
- W2017943259 hasConcept C100460472 @default.
- W2017943259 hasConcept C107551265 @default.
- W2017943259 hasConcept C111919701 @default.
- W2017943259 hasConcept C120665830 @default.
- W2017943259 hasConcept C121332964 @default.
- W2017943259 hasConcept C124634506 @default.
- W2017943259 hasConcept C130472188 @default.
- W2017943259 hasConcept C136525101 @default.
- W2017943259 hasConcept C142724271 @default.
- W2017943259 hasConcept C154945302 @default.
- W2017943259 hasConcept C155840801 @default.
- W2017943259 hasConcept C15744967 @default.
- W2017943259 hasConcept C158622935 @default.
- W2017943259 hasConcept C159985019 @default.
- W2017943259 hasConcept C165801399 @default.
- W2017943259 hasConcept C172707124 @default.
- W2017943259 hasConcept C17525397 @default.
- W2017943259 hasConcept C192562407 @default.
- W2017943259 hasConcept C204787440 @default.
- W2017943259 hasConcept C24890656 @default.
- W2017943259 hasConcept C2775924081 @default.
- W2017943259 hasConcept C2779227376 @default.
- W2017943259 hasConcept C41008148 @default.
- W2017943259 hasConcept C47446073 @default.
- W2017943259 hasConcept C49040817 @default.
- W2017943259 hasConcept C542102704 @default.
- W2017943259 hasConcept C62520636 @default.
- W2017943259 hasConcept C71924100 @default.
- W2017943259 hasConcept C98045186 @default.
- W2017943259 hasConceptScore W2017943259C100460472 @default.
- W2017943259 hasConceptScore W2017943259C107551265 @default.
- W2017943259 hasConceptScore W2017943259C111919701 @default.
- W2017943259 hasConceptScore W2017943259C120665830 @default.
- W2017943259 hasConceptScore W2017943259C121332964 @default.
- W2017943259 hasConceptScore W2017943259C124634506 @default.
- W2017943259 hasConceptScore W2017943259C130472188 @default.
- W2017943259 hasConceptScore W2017943259C136525101 @default.
- W2017943259 hasConceptScore W2017943259C142724271 @default.
- W2017943259 hasConceptScore W2017943259C154945302 @default.
- W2017943259 hasConceptScore W2017943259C155840801 @default.
- W2017943259 hasConceptScore W2017943259C15744967 @default.
- W2017943259 hasConceptScore W2017943259C158622935 @default.
- W2017943259 hasConceptScore W2017943259C159985019 @default.
- W2017943259 hasConceptScore W2017943259C165801399 @default.
- W2017943259 hasConceptScore W2017943259C172707124 @default.
- W2017943259 hasConceptScore W2017943259C17525397 @default.
- W2017943259 hasConceptScore W2017943259C192562407 @default.
- W2017943259 hasConceptScore W2017943259C204787440 @default.
- W2017943259 hasConceptScore W2017943259C24890656 @default.
- W2017943259 hasConceptScore W2017943259C2775924081 @default.
- W2017943259 hasConceptScore W2017943259C2779227376 @default.
- W2017943259 hasConceptScore W2017943259C41008148 @default.
- W2017943259 hasConceptScore W2017943259C47446073 @default.
- W2017943259 hasConceptScore W2017943259C49040817 @default.
- W2017943259 hasConceptScore W2017943259C542102704 @default.
- W2017943259 hasConceptScore W2017943259C62520636 @default.
- W2017943259 hasConceptScore W2017943259C71924100 @default.
- W2017943259 hasConceptScore W2017943259C98045186 @default.
- W2017943259 hasLocation W20179432591 @default.
- W2017943259 hasOpenAccess W2017943259 @default.
- W2017943259 hasPrimaryLocation W20179432591 @default.
- W2017943259 hasRelatedWork W1580395847 @default.
- W2017943259 hasRelatedWork W1604378724 @default.
- W2017943259 hasRelatedWork W2123766446 @default.
- W2017943259 hasRelatedWork W2164326006 @default.
- W2017943259 hasRelatedWork W2338373854 @default.
- W2017943259 hasRelatedWork W2382096225 @default.
- W2017943259 hasRelatedWork W2388096983 @default.
- W2017943259 hasRelatedWork W2443015857 @default.
- W2017943259 hasRelatedWork W2612501290 @default.
- W2017943259 hasRelatedWork W3158243431 @default.
- W2017943259 isParatext "false" @default.
- W2017943259 isRetracted "false" @default.
- W2017943259 magId "2017943259" @default.
- W2017943259 workType "article" @default.