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- W2017954350 abstract "The new laser interferometer having, high sensitivity and good stability is described in this paper, which has been developed for the purpose of measuring the line widths and pitches of micropatterns like LSI. In order to get an optically high sensitivity of 10 times, the optical path difference of the interferometer is multiplied by two pairs of prisms and the differential displacement of a fine movement table. The optical paths multipassed between a pair of cube corner and right-angled prisms are arranged biaxially by using the peculiar characteristic of a cube corner prism. By the arrangement of optical elements used in the interferometer it is possible to reduce the influences of both thermal expansion and refractive index change of air. And it is confirmed by theoretical analysis and experimental results that the new interferometer is sensitive and stable enough to measure micropatterns." @default.
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- W2017954350 date "1983-01-01" @default.
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- W2017954350 title "A New Differential Laser Interferometer with a Multiplied Optical Path Difference" @default.
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- W2017954350 doi "https://doi.org/10.1016/s0007-8506(07)63438-6" @default.
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