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- W2017967189 abstract "The film thickness estimation is one of most important subject for the design up of photomask blanks. For control of photomask specifications, the thickness measurement technology is the key of well-designed photomask blanks. The grazing- incidence X-ray reflectivity technology is very useful in order to measure thickness, density and interface roughness of photomask blank. In this paper, we reported the adaptation of the X-ray reflectivity technology to photomask evaluation. A Cr and ZrSi oxide thin photomask blanks were prepared with DC sputtering method. The X-ray reflectivities of those photomask blanks were measured with RIGAKU ATX-E diffractometer system. The thicknesses and densities of the photomask blanks were calculated with RIGAKU XDD degree(s) program. The coincidence between the calculated X-ray reflectivity curves with surface modified model which was defined with a surface oxidized layer is better than the calculated results without a surface oxidized layer. These results indicate that the photomask blanks have a surface oxidized layer. Thicknesses of the same position with same films were measured by ordinary technologies, for example, microscopic observation and thickness measurement technologies. The accuracy of those layer parameters which were calculated with X-ray reflectivity curves were better than those parameters measured with other microscopic and thickness measurement technologies." @default.
- W2017967189 created "2016-06-24" @default.
- W2017967189 creator A5006758917 @default.
- W2017967189 creator A5021211807 @default.
- W2017967189 creator A5031405000 @default.
- W2017967189 creator A5049461850 @default.
- W2017967189 creator A5050002401 @default.
- W2017967189 creator A5068516250 @default.
- W2017967189 creator A5088539373 @default.
- W2017967189 date "1999-12-30" @default.
- W2017967189 modified "2023-09-23" @default.
- W2017967189 title "High-resolution thickness measurements and evaluation of a photomask blank" @default.
- W2017967189 doi "https://doi.org/10.1117/12.373351" @default.
- W2017967189 hasPublicationYear "1999" @default.
- W2017967189 type Work @default.
- W2017967189 sameAs 2017967189 @default.
- W2017967189 citedByCount "0" @default.
- W2017967189 crossrefType "proceedings-article" @default.
- W2017967189 hasAuthorship W2017967189A5006758917 @default.
- W2017967189 hasAuthorship W2017967189A5021211807 @default.
- W2017967189 hasAuthorship W2017967189A5031405000 @default.
- W2017967189 hasAuthorship W2017967189A5049461850 @default.
- W2017967189 hasAuthorship W2017967189A5050002401 @default.
- W2017967189 hasAuthorship W2017967189A5068516250 @default.
- W2017967189 hasAuthorship W2017967189A5088539373 @default.
- W2017967189 hasConcept C107365816 @default.
- W2017967189 hasConcept C120665830 @default.
- W2017967189 hasConcept C121332964 @default.
- W2017967189 hasConcept C14737013 @default.
- W2017967189 hasConcept C159985019 @default.
- W2017967189 hasConcept C192562407 @default.
- W2017967189 hasConcept C2778089247 @default.
- W2017967189 hasConcept C2779227376 @default.
- W2017967189 hasConcept C49040817 @default.
- W2017967189 hasConcept C53524968 @default.
- W2017967189 hasConceptScore W2017967189C107365816 @default.
- W2017967189 hasConceptScore W2017967189C120665830 @default.
- W2017967189 hasConceptScore W2017967189C121332964 @default.
- W2017967189 hasConceptScore W2017967189C14737013 @default.
- W2017967189 hasConceptScore W2017967189C159985019 @default.
- W2017967189 hasConceptScore W2017967189C192562407 @default.
- W2017967189 hasConceptScore W2017967189C2778089247 @default.
- W2017967189 hasConceptScore W2017967189C2779227376 @default.
- W2017967189 hasConceptScore W2017967189C49040817 @default.
- W2017967189 hasConceptScore W2017967189C53524968 @default.
- W2017967189 hasLocation W20179671891 @default.
- W2017967189 hasOpenAccess W2017967189 @default.
- W2017967189 hasPrimaryLocation W20179671891 @default.
- W2017967189 hasRelatedWork W1988349244 @default.
- W2017967189 hasRelatedWork W2017675215 @default.
- W2017967189 hasRelatedWork W2028361153 @default.
- W2017967189 hasRelatedWork W2079318990 @default.
- W2017967189 hasRelatedWork W2086202217 @default.
- W2017967189 hasRelatedWork W2139871202 @default.
- W2017967189 hasRelatedWork W2156588976 @default.
- W2017967189 hasRelatedWork W4281570009 @default.
- W2017967189 hasRelatedWork W4306971710 @default.
- W2017967189 hasRelatedWork W2461417581 @default.
- W2017967189 isParatext "false" @default.
- W2017967189 isRetracted "false" @default.
- W2017967189 magId "2017967189" @default.
- W2017967189 workType "article" @default.