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- W2017995921 abstract "A ridge pattern is formed on a [111] oriented Gd 3 Ga 5 O 12 (GGG) substrate using an argon ion-beam etching at various ion incident angles between 90° and 45°. The relation between the ridge shapes and the ion incident angles is studied. The applicability of a phosphoric acid treatment after the ion-beam etching to smooth the ridge side wall is also examined. The ridge shape strongly depends on the ion incident angle. The phosphoric acid treatment causes a noticeable change of ridge shape dependent on the GGG crystal structure." @default.
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- W2017995921 title "Ion Incident Angle Dependence of Ridge Shapes Formed on [111] Oriented Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> by Ion Beam Etching" @default.
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