Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018018614> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2018018614 abstract "Thin film polymers play an essential role in system integration. The mechanical properties of the polymers are crucial for 3-D-Integration and advanced WLP because with the thinning of the silicon wafers, i.e. chips to less than 150 μm, the influence of the polymer layers gets an increasing impact on the mechanical stability of the electronic device. Next generation polymers have entered the market which are tailored to reach the further optimized mechanical property parameter set. This paper will give a guideline for the choice of the optimal polymer based on the demands of the application in relation to the material properties. The main material properties for high reliability are the Young's modulus, tensile strength, elongation at break and coefficient of thermal expansion. Aside of the material properties of the polymer the interaction of the polymer layer with the substrate is important. The material mismatch causes for example warpage and material cracking; the main impact factor being the residual stress in the layers in relation to the fracture toughness of the material and the interface. The warpage is an issue for the processing and the assembly process. The focus of our investigation is on properties of polymers on silicon substrates. The development of stresses in the polymer layers is measured and analyzed for different polymers (BCB, PI, PBO). The residual stress in a thin polymer film is measured by the warpage of the substrate in relation to different temperatures depending on the application. The estimation of stress-temperature behavior allows to develop processing concepts for a stress reduction being essential for 3-D integration. The generated stress drives cracking which leads to the effect that the impact of the forces should be taken into account for the quantification of the fracture toughness. The relation between the stress as the driving force and the fracture toughness are further discussed in details. A comprehensive study of the mechanical polymer properties is essential for high reliable devices." @default.
- W2018018614 created "2016-06-24" @default.
- W2018018614 creator A5003631866 @default.
- W2018018614 creator A5020058685 @default.
- W2018018614 creator A5049335445 @default.
- W2018018614 creator A5072613760 @default.
- W2018018614 creator A5077877382 @default.
- W2018018614 date "2014-05-01" @default.
- W2018018614 modified "2023-10-01" @default.
- W2018018614 title "Characterization of thin polymer films with the focus on lateral stress and mechanical properties and their relevance to microelectronics" @default.
- W2018018614 cites W1480687968 @default.
- W2018018614 cites W1970838820 @default.
- W2018018614 cites W2073604385 @default.
- W2018018614 cites W2144836897 @default.
- W2018018614 cites W2151701782 @default.
- W2018018614 cites W2166642074 @default.
- W2018018614 doi "https://doi.org/10.1109/ectc.2014.6897480" @default.
- W2018018614 hasPublicationYear "2014" @default.
- W2018018614 type Work @default.
- W2018018614 sameAs 2018018614 @default.
- W2018018614 citedByCount "3" @default.
- W2018018614 countsByYear W20180186142014 @default.
- W2018018614 countsByYear W20180186142015 @default.
- W2018018614 countsByYear W20180186142016 @default.
- W2018018614 crossrefType "proceedings-article" @default.
- W2018018614 hasAuthorship W2018018614A5003631866 @default.
- W2018018614 hasAuthorship W2018018614A5020058685 @default.
- W2018018614 hasAuthorship W2018018614A5049335445 @default.
- W2018018614 hasAuthorship W2018018614A5072613760 @default.
- W2018018614 hasAuthorship W2018018614A5077877382 @default.
- W2018018614 hasConcept C111368507 @default.
- W2018018614 hasConcept C112950240 @default.
- W2018018614 hasConcept C127313418 @default.
- W2018018614 hasConcept C138885662 @default.
- W2018018614 hasConcept C159985019 @default.
- W2018018614 hasConcept C171250308 @default.
- W2018018614 hasConcept C187937830 @default.
- W2018018614 hasConcept C192562407 @default.
- W2018018614 hasConcept C21036866 @default.
- W2018018614 hasConcept C2777289219 @default.
- W2018018614 hasConcept C31555180 @default.
- W2018018614 hasConcept C37292000 @default.
- W2018018614 hasConcept C41895202 @default.
- W2018018614 hasConcept C521977710 @default.
- W2018018614 hasConcept C97549433 @default.
- W2018018614 hasConcept C99595764 @default.
- W2018018614 hasConceptScore W2018018614C111368507 @default.
- W2018018614 hasConceptScore W2018018614C112950240 @default.
- W2018018614 hasConceptScore W2018018614C127313418 @default.
- W2018018614 hasConceptScore W2018018614C138885662 @default.
- W2018018614 hasConceptScore W2018018614C159985019 @default.
- W2018018614 hasConceptScore W2018018614C171250308 @default.
- W2018018614 hasConceptScore W2018018614C187937830 @default.
- W2018018614 hasConceptScore W2018018614C192562407 @default.
- W2018018614 hasConceptScore W2018018614C21036866 @default.
- W2018018614 hasConceptScore W2018018614C2777289219 @default.
- W2018018614 hasConceptScore W2018018614C31555180 @default.
- W2018018614 hasConceptScore W2018018614C37292000 @default.
- W2018018614 hasConceptScore W2018018614C41895202 @default.
- W2018018614 hasConceptScore W2018018614C521977710 @default.
- W2018018614 hasConceptScore W2018018614C97549433 @default.
- W2018018614 hasConceptScore W2018018614C99595764 @default.
- W2018018614 hasLocation W20180186141 @default.
- W2018018614 hasOpenAccess W2018018614 @default.
- W2018018614 hasPrimaryLocation W20180186141 @default.
- W2018018614 hasRelatedWork W1541254935 @default.
- W2018018614 hasRelatedWork W1983240100 @default.
- W2018018614 hasRelatedWork W1997508197 @default.
- W2018018614 hasRelatedWork W2022936950 @default.
- W2018018614 hasRelatedWork W2070147610 @default.
- W2018018614 hasRelatedWork W2073706372 @default.
- W2018018614 hasRelatedWork W2094612456 @default.
- W2018018614 hasRelatedWork W2098900834 @default.
- W2018018614 hasRelatedWork W2118550321 @default.
- W2018018614 hasRelatedWork W2120619020 @default.
- W2018018614 hasRelatedWork W2140720216 @default.
- W2018018614 hasRelatedWork W2163652433 @default.
- W2018018614 hasRelatedWork W2166432588 @default.
- W2018018614 hasRelatedWork W2168530189 @default.
- W2018018614 hasRelatedWork W2268037076 @default.
- W2018018614 hasRelatedWork W2587581820 @default.
- W2018018614 hasRelatedWork W2594267237 @default.
- W2018018614 hasRelatedWork W2938225403 @default.
- W2018018614 hasRelatedWork W3147308737 @default.
- W2018018614 hasRelatedWork W2129156712 @default.
- W2018018614 isParatext "false" @default.
- W2018018614 isRetracted "false" @default.
- W2018018614 magId "2018018614" @default.
- W2018018614 workType "article" @default.