FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018049292> ?p ?o ?g. }

• W2018049292 endingPage "1577" @default.
• W2018049292 startingPage "1573" @default.
• W2018049292 abstract "Presented in this study are the results of an experiment that was performed regarding the effects of plasma post-treatment on the material properties of amorphous indium zinc oxide (a-IZO) films, and on the device characteristics of the thin film transistor when an a-IZO film is used as the channel layer. Prior to the source/drain deposition, post-treatment was performed on the area that was not covered by photoresist (PR), using Ar and H2 plasma. The electrical resistivity of a-IZO films was dramatically reduced when they were plasma-treated. The creation of an oxygen vacancy and the formation of hydroxyls in the a-IZO film due to plasma treatment were identified via X-ray photoelectron spectroscopy (XPS) analysis. The change in the field effect mobility (μFE) due to the plasma post-treatment was inversely proportional to the change in the contact resistance (RC) of the plasma-treated a-IZO layer. The prolonged (> 1 min) treatment using H2 plasma caused deep electron traps and surface damages, resulting in the increased RC (or decreased μFE) of the a-IZO TFT. In addition, for the a-IZO TFT that underwent H2 plasma treatment, the VT monotonically decreased whereas the VT of the a-IZO TFT that was Ar-plasma-treated remained almost the same as that of the untreated a-IZO TFT." @default.
• W2018049292 created "2016-06-24" @default.
• W2018049292 creator A5002739553 @default.
• W2018049292 creator A5019669804 @default.
• W2018049292 creator A5031777112 @default.
• W2018049292 creator A5056976307 @default.
• W2018049292 creator A5073470215 @default.
• W2018049292 date "2010-12-01" @default.
• W2018049292 modified "2023-09-26" @default.
• W2018049292 title "Effects of post plasma treatment on material properties and device characteristics in indium zinc oxide thin film transistors" @default.
• W2018049292 cites W1965733598 @default.
• W2018049292 cites W1978269022 @default.
• W2018049292 cites W1989133473 @default.
• W2018049292 cites W1990616401 @default.
• W2018049292 cites W1999589524 @default.
• W2018049292 cites W2002291257 @default.
• W2018049292 cites W2004005023 @default.
• W2018049292 cites W2004658473 @default.
• W2018049292 cites W2007419035 @default.
• W2018049292 cites W2009956726 @default.
• W2018049292 cites W2013331828 @default.
• W2018049292 cites W2036656385 @default.
• W2018049292 cites W2037822222 @default.
• W2018049292 cites W2038957825 @default.
• W2018049292 cites W2041173243 @default.
• W2018049292 cites W2061071530 @default.
• W2018049292 cites W2066592833 @default.
• W2018049292 cites W2088803443 @default.
• W2018049292 cites W2090737533 @default.
• W2018049292 cites W2090762163 @default.
• W2018049292 cites W2128583000 @default.
• W2018049292 cites W2162345217 @default.
• W2018049292 cites W2321631602 @default.
• W2018049292 cites W2067783730 @default.
• W2018049292 doi "https://doi.org/10.1016/j.tsf.2010.08.082" @default.
• W2018049292 hasPublicationYear "2010" @default.
• W2018049292 type Work @default.
• W2018049292 sameAs 2018049292 @default.
• W2018049292 citedByCount "31" @default.
• W2018049292 countsByYear W20180492922012 @default.
• W2018049292 countsByYear W20180492922013 @default.
• W2018049292 countsByYear W20180492922014 @default.
• W2018049292 countsByYear W20180492922015 @default.
• W2018049292 countsByYear W20180492922016 @default.
• W2018049292 countsByYear W20180492922017 @default.
• W2018049292 countsByYear W20180492922018 @default.
• W2018049292 countsByYear W20180492922019 @default.
• W2018049292 countsByYear W20180492922020 @default.
• W2018049292 countsByYear W20180492922021 @default.
• W2018049292 countsByYear W20180492922022 @default.
• W2018049292 countsByYear W20180492922023 @default.
• W2018049292 crossrefType "journal-article" @default.
• W2018049292 hasAuthorship W2018049292A5002739553 @default.
• W2018049292 hasAuthorship W2018049292A5019669804 @default.
• W2018049292 hasAuthorship W2018049292A5031777112 @default.
• W2018049292 hasAuthorship W2018049292A5056976307 @default.
• W2018049292 hasAuthorship W2018049292A5073470215 @default.
• W2018049292 hasConcept C113196181 @default.
• W2018049292 hasConcept C121332964 @default.
• W2018049292 hasConcept C127413603 @default.
• W2018049292 hasConcept C171250308 @default.
• W2018049292 hasConcept C175708663 @default.
• W2018049292 hasConcept C185592680 @default.
• W2018049292 hasConcept C19067145 @default.
• W2018049292 hasConcept C192562407 @default.
• W2018049292 hasConcept C2779227376 @default.
• W2018049292 hasConcept C42360764 @default.
• W2018049292 hasConcept C43617362 @default.
• W2018049292 hasConcept C49040817 @default.
• W2018049292 hasConcept C543292547 @default.
• W2018049292 hasConcept C56052488 @default.
• W2018049292 hasConcept C62520636 @default.
• W2018049292 hasConcept C8010536 @default.
• W2018049292 hasConcept C82706917 @default.
• W2018049292 hasConcept C87359718 @default.
• W2018049292 hasConceptScore W2018049292C113196181 @default.
• W2018049292 hasConceptScore W2018049292C121332964 @default.
• W2018049292 hasConceptScore W2018049292C127413603 @default.
• W2018049292 hasConceptScore W2018049292C171250308 @default.
• W2018049292 hasConceptScore W2018049292C175708663 @default.
• W2018049292 hasConceptScore W2018049292C185592680 @default.
• W2018049292 hasConceptScore W2018049292C19067145 @default.
• W2018049292 hasConceptScore W2018049292C192562407 @default.
• W2018049292 hasConceptScore W2018049292C2779227376 @default.
• W2018049292 hasConceptScore W2018049292C42360764 @default.
• W2018049292 hasConceptScore W2018049292C43617362 @default.
• W2018049292 hasConceptScore W2018049292C49040817 @default.
• W2018049292 hasConceptScore W2018049292C543292547 @default.
• W2018049292 hasConceptScore W2018049292C56052488 @default.
• W2018049292 hasConceptScore W2018049292C62520636 @default.
• W2018049292 hasConceptScore W2018049292C8010536 @default.
• W2018049292 hasConceptScore W2018049292C82706917 @default.
• W2018049292 hasConceptScore W2018049292C87359718 @default.
• W2018049292 hasIssue "5" @default.
• W2018049292 hasLocation W20180492921 @default.
• W2018049292 hasOpenAccess W2018049292 @default.
• W2018049292 hasPrimaryLocation W20180492921 @default.
• W2018049292 hasRelatedWork W1504885410 @default.

• next