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• W2018069046 abstract "The structure and chemistry of the interface between a Si(111) substrate and an AlN(0001) thin film grown by metalorganic vapor phase epitaxy have been investigated at a subnanometer scale using high-angle annular dark field imaging and electron energy-loss spectroscopy. ⟨112¯0⟩AlN∥⟨110⟩Si and ⟨0001⟩AlN∥⟨111⟩Si epitaxial relations were observed and an Al-face polarity of the AlN thin film was determined. Despite the use of Al deposition on the Si surface prior to the growth, an amorphous interlayer of composition SiNx was identified at the interface. Mechanisms leading to its formation are discussed." @default.
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• W2018069046 date "2010-12-20" @default.
• W2018069046 modified "2023-10-13" @default.
• W2018069046 title "Scanning transmission electron microscopy investigation of the Si(111)/AlN interface grown by metalorganic vapor phase epitaxy" @default.
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• W2018069046 doi "https://doi.org/10.1063/1.3527928" @default.
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