FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018076529> ?p ?o ?g. }

• W2018076529 endingPage "400" @default.
• W2018076529 startingPage "395" @default.
• W2018076529 abstract "In this work, we investigate the effect of performing a high dose 20 keV He+ implant before the implantation of B at low energy (3 keV) in silicon and the subsequent thermal annealing at 800 °C. The implants were performed in laterally confined regions defined by opening windows in a SiO2 mask, in order to evidence the impact on a realistic configuration used in device fabrication. High resolution quantitative scanning capacitance microscopy (SCM) combined with cross-section transmission electron microscopy (XTEM) allowed to clarify the role of the voids distribution produced during the thermal annealing on the diffusion and electrical activation of implanted B in Si. Particular evidence was given to the effect of the uniform nanovoids distribution, which forms in the region between the surface and the buried cavity layer." @default.
• W2018076529 created "2016-06-24" @default.
• W2018076529 creator A5012394754 @default.
• W2018076529 creator A5022757793 @default.
• W2018076529 creator A5041246288 @default.
• W2018076529 creator A5044460482 @default.
• W2018076529 creator A5049003724 @default.
• W2018076529 creator A5055755772 @default.
• W2018076529 creator A5069135661 @default.
• W2018076529 creator A5085500043 @default.
• W2018076529 date "2005-12-01" @default.
• W2018076529 modified "2023-10-18" @default.
• W2018076529 title "Effect of Self-Interstitials – Nanovoids Interaction on Two-Dimensional Diffusion and Activation of Implanted B in Si" @default.
• W2018076529 cites W1970463987 @default.
• W2018076529 cites W1974257332 @default.
• W2018076529 cites W1988220998 @default.
• W2018076529 cites W1988340167 @default.
• W2018076529 cites W1997960115 @default.
• W2018076529 cites W2000628944 @default.
• W2018076529 cites W2008373054 @default.
• W2018076529 cites W2010192092 @default.
• W2018076529 cites W2010637224 @default.
• W2018076529 cites W2017512312 @default.
• W2018076529 cites W2039187132 @default.
• W2018076529 cites W2154097547 @default.
• W2018076529 doi "https://doi.org/10.4028/www.scientific.net/ssp.108-109.395" @default.
• W2018076529 hasPublicationYear "2005" @default.
• W2018076529 type Work @default.
• W2018076529 sameAs 2018076529 @default.
• W2018076529 citedByCount "2" @default.
• W2018076529 countsByYear W20180765292017 @default.
• W2018076529 crossrefType "journal-article" @default.
• W2018076529 hasAuthorship W2018076529A5012394754 @default.
• W2018076529 hasAuthorship W2018076529A5022757793 @default.
• W2018076529 hasAuthorship W2018076529A5041246288 @default.
• W2018076529 hasAuthorship W2018076529A5044460482 @default.
• W2018076529 hasAuthorship W2018076529A5049003724 @default.
• W2018076529 hasAuthorship W2018076529A5055755772 @default.
• W2018076529 hasAuthorship W2018076529A5069135661 @default.
• W2018076529 hasAuthorship W2018076529A5085500043 @default.
• W2018076529 hasConcept C121332964 @default.
• W2018076529 hasConcept C136525101 @default.
• W2018076529 hasConcept C142724271 @default.
• W2018076529 hasConcept C145148216 @default.
• W2018076529 hasConcept C146088050 @default.
• W2018076529 hasConcept C153294291 @default.
• W2018076529 hasConcept C159985019 @default.
• W2018076529 hasConcept C171250308 @default.
• W2018076529 hasConcept C178790620 @default.
• W2018076529 hasConcept C185592680 @default.
• W2018076529 hasConcept C192562407 @default.
• W2018076529 hasConcept C204530211 @default.
• W2018076529 hasConcept C204787440 @default.
• W2018076529 hasConcept C2777855556 @default.
• W2018076529 hasConcept C41823505 @default.
• W2018076529 hasConcept C49040817 @default.
• W2018076529 hasConcept C544956773 @default.
• W2018076529 hasConcept C62520636 @default.
• W2018076529 hasConcept C69357855 @default.
• W2018076529 hasConcept C71924100 @default.
• W2018076529 hasConcept C95121573 @default.
• W2018076529 hasConcept C97355855 @default.
• W2018076529 hasConceptScore W2018076529C121332964 @default.
• W2018076529 hasConceptScore W2018076529C136525101 @default.
• W2018076529 hasConceptScore W2018076529C142724271 @default.
• W2018076529 hasConceptScore W2018076529C145148216 @default.
• W2018076529 hasConceptScore W2018076529C146088050 @default.
• W2018076529 hasConceptScore W2018076529C153294291 @default.
• W2018076529 hasConceptScore W2018076529C159985019 @default.
• W2018076529 hasConceptScore W2018076529C171250308 @default.
• W2018076529 hasConceptScore W2018076529C178790620 @default.
• W2018076529 hasConceptScore W2018076529C185592680 @default.
• W2018076529 hasConceptScore W2018076529C192562407 @default.
• W2018076529 hasConceptScore W2018076529C204530211 @default.
• W2018076529 hasConceptScore W2018076529C204787440 @default.
• W2018076529 hasConceptScore W2018076529C2777855556 @default.
• W2018076529 hasConceptScore W2018076529C41823505 @default.
• W2018076529 hasConceptScore W2018076529C49040817 @default.
• W2018076529 hasConceptScore W2018076529C544956773 @default.
• W2018076529 hasConceptScore W2018076529C62520636 @default.
• W2018076529 hasConceptScore W2018076529C69357855 @default.
• W2018076529 hasConceptScore W2018076529C71924100 @default.
• W2018076529 hasConceptScore W2018076529C95121573 @default.
• W2018076529 hasConceptScore W2018076529C97355855 @default.
• W2018076529 hasLocation W20180765291 @default.
• W2018076529 hasOpenAccess W2018076529 @default.
• W2018076529 hasPrimaryLocation W20180765291 @default.
• W2018076529 hasRelatedWork W1997428111 @default.
• W2018076529 hasRelatedWork W2029288257 @default.
• W2018076529 hasRelatedWork W2031170839 @default.
• W2018076529 hasRelatedWork W2037252009 @default.
• W2018076529 hasRelatedWork W2048269824 @default.
• W2018076529 hasRelatedWork W2058979042 @default.
• W2018076529 hasRelatedWork W2065669148 @default.
• W2018076529 hasRelatedWork W2071047578 @default.
• W2018076529 hasRelatedWork W2074173678 @default.
• W2018076529 hasRelatedWork W2275386326 @default.
• W2018076529 hasVolume "108-109" @default.

• next