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- W2018164691 abstract "Photopatterning is described using chemically amplified resists formulated from the copolymer of di-t-butyl fumarate and styrene with various acid-photogenerators. Exposure of the materials to deep- and mid-UV light followed by postbaking results in significant changes in solubility and polarity due to carboxylic functions produced on the polymer chain through the action of photogenerated acid catalyst (chemical amplification). As resists, they possess good sensitivity (14-40 mJ/cm<SUP>2</SUP>), contrast ((gamma) >4) and thermostability (up to 300 degree(s) C). Relief images with good resolution can be readily obtained with either aqueous base (positive-tone) or organic (negative-tone) solvents as developer. Such photoinduced changes of the functional groups in the exposed areas were also used to pattern molecules on the surface at micron-scale, thus generating functional images, as illustrated by the selective binding of fluorescent dyes in either exposed (positive-tone) or unexposed (negative-tone) areas." @default.
- W2018164691 created "2016-06-24" @default.
- W2018164691 creator A5048921044 @default.
- W2018164691 creator A5052726595 @default.
- W2018164691 creator A5086316110 @default.
- W2018164691 date "1994-05-16" @default.
- W2018164691 modified "2023-09-23" @default.
- W2018164691 title "Dialkyl fumarate copolymers: new photoresist materials for deep- and mid-UV microlithography" @default.
- W2018164691 doi "https://doi.org/10.1117/12.175345" @default.
- W2018164691 hasPublicationYear "1994" @default.
- W2018164691 type Work @default.
- W2018164691 sameAs 2018164691 @default.
- W2018164691 citedByCount "0" @default.
- W2018164691 crossrefType "proceedings-article" @default.
- W2018164691 hasAuthorship W2018164691A5048921044 @default.
- W2018164691 hasAuthorship W2018164691A5052726595 @default.
- W2018164691 hasAuthorship W2018164691A5086316110 @default.
- W2018164691 hasConcept C120665830 @default.
- W2018164691 hasConcept C121332964 @default.
- W2018164691 hasConcept C134406635 @default.
- W2018164691 hasConcept C15920480 @default.
- W2018164691 hasConcept C171250308 @default.
- W2018164691 hasConcept C178790620 @default.
- W2018164691 hasConcept C181199279 @default.
- W2018164691 hasConcept C184651966 @default.
- W2018164691 hasConcept C185592680 @default.
- W2018164691 hasConcept C188027245 @default.
- W2018164691 hasConcept C192562407 @default.
- W2018164691 hasConcept C2779227376 @default.
- W2018164691 hasConcept C2781216036 @default.
- W2018164691 hasConcept C32909587 @default.
- W2018164691 hasConcept C521977710 @default.
- W2018164691 hasConcept C53524968 @default.
- W2018164691 hasConcept C75473681 @default.
- W2018164691 hasConcept C91881484 @default.
- W2018164691 hasConceptScore W2018164691C120665830 @default.
- W2018164691 hasConceptScore W2018164691C121332964 @default.
- W2018164691 hasConceptScore W2018164691C134406635 @default.
- W2018164691 hasConceptScore W2018164691C15920480 @default.
- W2018164691 hasConceptScore W2018164691C171250308 @default.
- W2018164691 hasConceptScore W2018164691C178790620 @default.
- W2018164691 hasConceptScore W2018164691C181199279 @default.
- W2018164691 hasConceptScore W2018164691C184651966 @default.
- W2018164691 hasConceptScore W2018164691C185592680 @default.
- W2018164691 hasConceptScore W2018164691C188027245 @default.
- W2018164691 hasConceptScore W2018164691C192562407 @default.
- W2018164691 hasConceptScore W2018164691C2779227376 @default.
- W2018164691 hasConceptScore W2018164691C2781216036 @default.
- W2018164691 hasConceptScore W2018164691C32909587 @default.
- W2018164691 hasConceptScore W2018164691C521977710 @default.
- W2018164691 hasConceptScore W2018164691C53524968 @default.
- W2018164691 hasConceptScore W2018164691C75473681 @default.
- W2018164691 hasConceptScore W2018164691C91881484 @default.
- W2018164691 hasLocation W20181646911 @default.
- W2018164691 hasOpenAccess W2018164691 @default.
- W2018164691 hasPrimaryLocation W20181646911 @default.
- W2018164691 hasRelatedWork W1988881208 @default.
- W2018164691 hasRelatedWork W1997477484 @default.
- W2018164691 hasRelatedWork W2008725130 @default.
- W2018164691 hasRelatedWork W2009842817 @default.
- W2018164691 hasRelatedWork W2030479646 @default.
- W2018164691 hasRelatedWork W2030706476 @default.
- W2018164691 hasRelatedWork W2061581666 @default.
- W2018164691 hasRelatedWork W2358116966 @default.
- W2018164691 hasRelatedWork W2594137734 @default.
- W2018164691 hasRelatedWork W3205587479 @default.
- W2018164691 isParatext "false" @default.
- W2018164691 isRetracted "false" @default.
- W2018164691 magId "2018164691" @default.
- W2018164691 workType "article" @default.