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• W2018182802 abstract "One-dimensional silicon nanowire structures have been successfully made by using the proximity and accumulation effects of electron-beam (e-beam) lithography. Wire structures are fabricated in a thin poly silicon layer on a silicon substrate with a 400 nm buried SiO2. Measurements of the current–voltage characteristics at various temperatures from 35 to 200 K show significant non-linearities and conductance peaks indicating the existence of single-electron behavior. The blockade size is significantly affected by thermal effects, oscillations of the blockade, and the conductivity dependence on the gate potential." @default.
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• W2018182802 date "2004-04-01" @default.
• W2018182802 modified "2023-09-26" @default.
• W2018182802 title "Fabrication of silicon nanowire structures based on proximity effects of electron-beam lithography" @default.
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• W2018182802 doi "https://doi.org/10.1016/j.ssc.2004.01.015" @default.
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