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- W2018183265 abstract "The author describes optical lithography in the context of the semiconductor industry. Past trends are evaluated and used to predict future possibilities. The economics of the semiconductor industry, and thus optical lithography, is discussed and its impact on technology development explained. Wavefront engineering seems to be the most promising approach to extending the life of optical lithography in the near future." @default.
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- W2018183265 title "Trends in Optical Lithography" @default.
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- W2018183265 doi "https://doi.org/10.1364/opn.7.4.000029" @default.
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