FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018213852> ?p ?o ?g. }

• W2018213852 endingPage "720" @default.
• W2018213852 startingPage "717" @default.
• W2018213852 abstract "Transient phenomena in surface recession of silicon were investigated using a finely focused, normally incident 12 keV O2+ beam rastered over 8 µm wide squares. The depth of the sputtered craters was determined by atomic force microscopy. A linear depth–fluence relation was observed above ∼2.2 × 1017 O atoms cm−2. The crater depth offset was found to be −2.6 ± 0.5 nm. This is significantly smaller than the offset of −4.3 nm predicted by an analytical sputtering–oxidation model (ASOM). The original version of the model involved the assumption that the decrease in silicon removal rate is directly correlated with the total oxygen content of the sample. The present results support the idea that the changes in sputtering yield are proportional to the amount of oxygen accumulating at the receding surface in the form of SiO2. Evidence is also provided that the frequently used ISRD simulation code (predicted crater depth offset about −8 nm) needs further revisions. Copyright © 2000 John Wiley & Sons, Ltd." @default.
• W2018213852 created "2016-06-24" @default.
• W2018213852 creator A5009510255 @default.
• W2018213852 creator A5013412968 @default.
• W2018213852 creator A5025804993 @default.
• W2018213852 date "2000-01-01" @default.
• W2018213852 modified "2023-09-25" @default.
• W2018213852 title "Surface recession of silicon under normally incident oxygen bombardment studied by atomic force microscopy of microscale sputtered craters" @default.
• W2018213852 cites W1582747730 @default.
• W2018213852 cites W1984537200 @default.
• W2018213852 cites W1988524201 @default.
• W2018213852 cites W2001214494 @default.
• W2018213852 cites W2009934845 @default.
• W2018213852 cites W2012555355 @default.
• W2018213852 cites W2024345538 @default.
• W2018213852 cites W2028647471 @default.
• W2018213852 cites W2032522672 @default.
• W2018213852 cites W2037371816 @default.
• W2018213852 cites W2074058437 @default.
• W2018213852 cites W2095295003 @default.
• W2018213852 cites W2124724143 @default.
• W2018213852 cites W2330318522 @default.
• W2018213852 cites W2726066218 @default.
• W2018213852 doi "https://doi.org/10.1002/1096-9918(200010)29:10<717::aid-sia912>3.0.co;2-l" @default.
• W2018213852 hasPublicationYear "2000" @default.
• W2018213852 type Work @default.
• W2018213852 sameAs 2018213852 @default.
• W2018213852 citedByCount "5" @default.
• W2018213852 crossrefType "journal-article" @default.
• W2018213852 hasAuthorship W2018213852A5009510255 @default.
• W2018213852 hasAuthorship W2018213852A5013412968 @default.
• W2018213852 hasAuthorship W2018213852A5025804993 @default.
• W2018213852 hasConcept C113196181 @default.
• W2018213852 hasConcept C121332964 @default.
• W2018213852 hasConcept C134121241 @default.
• W2018213852 hasConcept C145148216 @default.
• W2018213852 hasConcept C145420912 @default.
• W2018213852 hasConcept C159985019 @default.
• W2018213852 hasConcept C171250308 @default.
• W2018213852 hasConcept C175291020 @default.
• W2018213852 hasConcept C178790620 @default.
• W2018213852 hasConcept C179428855 @default.
• W2018213852 hasConcept C179537507 @default.
• W2018213852 hasConcept C185592680 @default.
• W2018213852 hasConcept C19067145 @default.
• W2018213852 hasConcept C192562407 @default.
• W2018213852 hasConcept C199289684 @default.
• W2018213852 hasConcept C199360897 @default.
• W2018213852 hasConcept C22078206 @default.
• W2018213852 hasConcept C22423302 @default.
• W2018213852 hasConcept C33923547 @default.
• W2018213852 hasConcept C41008148 @default.
• W2018213852 hasConcept C41999313 @default.
• W2018213852 hasConcept C43617362 @default.
• W2018213852 hasConcept C49040817 @default.
• W2018213852 hasConcept C540031477 @default.
• W2018213852 hasConcept C544956773 @default.
• W2018213852 hasConcept C87355193 @default.
• W2018213852 hasConceptScore W2018213852C113196181 @default.
• W2018213852 hasConceptScore W2018213852C121332964 @default.
• W2018213852 hasConceptScore W2018213852C134121241 @default.
• W2018213852 hasConceptScore W2018213852C145148216 @default.
• W2018213852 hasConceptScore W2018213852C145420912 @default.
• W2018213852 hasConceptScore W2018213852C159985019 @default.
• W2018213852 hasConceptScore W2018213852C171250308 @default.
• W2018213852 hasConceptScore W2018213852C175291020 @default.
• W2018213852 hasConceptScore W2018213852C178790620 @default.
• W2018213852 hasConceptScore W2018213852C179428855 @default.
• W2018213852 hasConceptScore W2018213852C179537507 @default.
• W2018213852 hasConceptScore W2018213852C185592680 @default.
• W2018213852 hasConceptScore W2018213852C19067145 @default.
• W2018213852 hasConceptScore W2018213852C192562407 @default.
• W2018213852 hasConceptScore W2018213852C199289684 @default.
• W2018213852 hasConceptScore W2018213852C199360897 @default.
• W2018213852 hasConceptScore W2018213852C22078206 @default.
• W2018213852 hasConceptScore W2018213852C22423302 @default.
• W2018213852 hasConceptScore W2018213852C33923547 @default.
• W2018213852 hasConceptScore W2018213852C41008148 @default.
• W2018213852 hasConceptScore W2018213852C41999313 @default.
• W2018213852 hasConceptScore W2018213852C43617362 @default.
• W2018213852 hasConceptScore W2018213852C49040817 @default.
• W2018213852 hasConceptScore W2018213852C540031477 @default.
• W2018213852 hasConceptScore W2018213852C544956773 @default.
• W2018213852 hasConceptScore W2018213852C87355193 @default.
• W2018213852 hasIssue "10" @default.
• W2018213852 hasLocation W20182138521 @default.
• W2018213852 hasOpenAccess W2018213852 @default.
• W2018213852 hasPrimaryLocation W20182138521 @default.
• W2018213852 hasRelatedWork W1967910880 @default.
• W2018213852 hasRelatedWork W1968293950 @default.
• W2018213852 hasRelatedWork W1968883407 @default.
• W2018213852 hasRelatedWork W1970800609 @default.
• W2018213852 hasRelatedWork W1980505198 @default.
• W2018213852 hasRelatedWork W1987015944 @default.
• W2018213852 hasRelatedWork W1992830897 @default.
• W2018213852 hasRelatedWork W2006158997 @default.
• W2018213852 hasRelatedWork W2036658831 @default.
• W2018213852 hasRelatedWork W2954093611 @default.

• next