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- W2018218160 abstract "Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction." @default.
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- W2018218160 date "1991-12-01" @default.
- W2018218160 modified "2023-09-23" @default.
- W2018218160 title "Laser-induced etched grating on InP for integrated optical circuit elements" @default.
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- W2018218160 doi "https://doi.org/10.1117/12.50910" @default.
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