FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018221409> ?p ?o ?g. }

• W2018221409 abstract "Capacitive resonant mass sensing using a single-crystalline silicon resonator with an electrical LC oscillator was demonstrated in ambient atmosphere. Using capacitive detection method, the detectable minimum mass of 1×10−14g was obtained in the self-oscillation of cantilever with a thickness of 250nm. The noise amplitude of the sensor output corresponds to a vibration amplitude of 0.05nm∕(Hz)0.5 in the frequency domain compared with the actuation signal, which is equivalent to the detectable minimum capacitance variation of 2.4×10−21F. Using the capacitive detection method, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor in a pure N2 gas as a carrier is successfully demonstrated. These results show the high potential of capacitive silicon resonator for high mass/stress-sensitive sensor." @default.
• W2018221409 created "2016-06-24" @default.
• W2018221409 creator A5055348625 @default.
• W2018221409 creator A5057746028 @default.
• W2018221409 creator A5077280543 @default.
• W2018221409 date "2007-08-01" @default.
• W2018221409 modified "2023-09-23" @default.
• W2018221409 title "Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique" @default.
• W2018221409 cites W1968416806 @default.
• W2018221409 cites W1968514543 @default.
• W2018221409 cites W1979563351 @default.
• W2018221409 cites W1983910981 @default.
• W2018221409 cites W1999822381 @default.
• W2018221409 cites W2001710792 @default.
• W2018221409 cites W2008308944 @default.
• W2018221409 cites W2013582350 @default.
• W2018221409 cites W2015493672 @default.
• W2018221409 cites W2028791663 @default.
• W2018221409 cites W2032067921 @default.
• W2018221409 cites W2051001465 @default.
• W2018221409 cites W2065962717 @default.
• W2018221409 cites W2077125422 @default.
• W2018221409 cites W2085393286 @default.
• W2018221409 cites W2110391438 @default.
• W2018221409 cites W2123580065 @default.
• W2018221409 cites W2126531782 @default.
• W2018221409 cites W2129434196 @default.
• W2018221409 cites W2134689820 @default.
• W2018221409 cites W2162469815 @default.
• W2018221409 cites W3103439949 @default.
• W2018221409 doi "https://doi.org/10.1063/1.2766840" @default.
• W2018221409 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/17764351" @default.
• W2018221409 hasPublicationYear "2007" @default.
• W2018221409 type Work @default.
• W2018221409 sameAs 2018221409 @default.
• W2018221409 citedByCount "12" @default.
• W2018221409 countsByYear W20182214092012 @default.
• W2018221409 countsByYear W20182214092013 @default.
• W2018221409 countsByYear W20182214092014 @default.
• W2018221409 countsByYear W20182214092015 @default.
• W2018221409 countsByYear W20182214092016 @default.
• W2018221409 countsByYear W20182214092017 @default.
• W2018221409 countsByYear W20182214092018 @default.
• W2018221409 crossrefType "journal-article" @default.
• W2018221409 hasAuthorship W2018221409A5055348625 @default.
• W2018221409 hasAuthorship W2018221409A5057746028 @default.
• W2018221409 hasAuthorship W2018221409A5077280543 @default.
• W2018221409 hasConcept C115961682 @default.
• W2018221409 hasConcept C119599485 @default.
• W2018221409 hasConcept C120665830 @default.
• W2018221409 hasConcept C121332964 @default.
• W2018221409 hasConcept C127413603 @default.
• W2018221409 hasConcept C139210041 @default.
• W2018221409 hasConcept C141354745 @default.
• W2018221409 hasConcept C154945302 @default.
• W2018221409 hasConcept C159985019 @default.
• W2018221409 hasConcept C165801399 @default.
• W2018221409 hasConcept C17525397 @default.
• W2018221409 hasConcept C180205008 @default.
• W2018221409 hasConcept C184779094 @default.
• W2018221409 hasConcept C185592680 @default.
• W2018221409 hasConcept C192562407 @default.
• W2018221409 hasConcept C198394728 @default.
• W2018221409 hasConcept C199360897 @default.
• W2018221409 hasConcept C206755178 @default.
• W2018221409 hasConcept C24890656 @default.
• W2018221409 hasConcept C2778439541 @default.
• W2018221409 hasConcept C2779843651 @default.
• W2018221409 hasConcept C30066665 @default.
• W2018221409 hasConcept C34627536 @default.
• W2018221409 hasConcept C41008148 @default.
• W2018221409 hasConcept C49040817 @default.
• W2018221409 hasConcept C52192207 @default.
• W2018221409 hasConcept C544956773 @default.
• W2018221409 hasConcept C55493867 @default.
• W2018221409 hasConcept C62520636 @default.
• W2018221409 hasConcept C97126364 @default.
• W2018221409 hasConcept C99498987 @default.
• W2018221409 hasConceptScore W2018221409C115961682 @default.
• W2018221409 hasConceptScore W2018221409C119599485 @default.
• W2018221409 hasConceptScore W2018221409C120665830 @default.
• W2018221409 hasConceptScore W2018221409C121332964 @default.
• W2018221409 hasConceptScore W2018221409C127413603 @default.
• W2018221409 hasConceptScore W2018221409C139210041 @default.
• W2018221409 hasConceptScore W2018221409C141354745 @default.
• W2018221409 hasConceptScore W2018221409C154945302 @default.
• W2018221409 hasConceptScore W2018221409C159985019 @default.
• W2018221409 hasConceptScore W2018221409C165801399 @default.
• W2018221409 hasConceptScore W2018221409C17525397 @default.
• W2018221409 hasConceptScore W2018221409C180205008 @default.
• W2018221409 hasConceptScore W2018221409C184779094 @default.
• W2018221409 hasConceptScore W2018221409C185592680 @default.
• W2018221409 hasConceptScore W2018221409C192562407 @default.
• W2018221409 hasConceptScore W2018221409C198394728 @default.
• W2018221409 hasConceptScore W2018221409C199360897 @default.
• W2018221409 hasConceptScore W2018221409C206755178 @default.
• W2018221409 hasConceptScore W2018221409C24890656 @default.
• W2018221409 hasConceptScore W2018221409C2778439541 @default.
• W2018221409 hasConceptScore W2018221409C2779843651 @default.
• W2018221409 hasConceptScore W2018221409C30066665 @default.

• next