Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018229991> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2018229991 endingPage "219" @default.
- W2018229991 startingPage "214" @default.
- W2018229991 abstract "Abstract Intrinsic oxide layers on silicon (100) and polycrystalline titanium surfaces were generated by ion implantation with oxygen ion beams at energies between 2 and 5 keV. The oxide films were characterized by Auger sputter depth profiling. Composition and growth of the surface layers were investigated as a function of the ion fluence and the ion energy. The oxygen concentration depth profiles in silicon are compared with theoretical predictions from range calculations for low energy ion implantation." @default.
- W2018229991 created "2016-06-24" @default.
- W2018229991 creator A5031749144 @default.
- W2018229991 creator A5049496661 @default.
- W2018229991 date "1991-07-01" @default.
- W2018229991 modified "2023-10-16" @default.
- W2018229991 title "Formation of intrinsic oxide layers by ion implantation of silicon and titanium in the low kiloelectronvolt regime" @default.
- W2018229991 cites W1984488440 @default.
- W2018229991 cites W1990809725 @default.
- W2018229991 cites W2028777442 @default.
- W2018229991 cites W2080099324 @default.
- W2018229991 cites W2088201711 @default.
- W2018229991 cites W2118199885 @default.
- W2018229991 doi "https://doi.org/10.1016/0921-5093(91)90619-x" @default.
- W2018229991 hasPublicationYear "1991" @default.
- W2018229991 type Work @default.
- W2018229991 sameAs 2018229991 @default.
- W2018229991 citedByCount "5" @default.
- W2018229991 countsByYear W20182299912019 @default.
- W2018229991 crossrefType "journal-article" @default.
- W2018229991 hasAuthorship W2018229991A5031749144 @default.
- W2018229991 hasAuthorship W2018229991A5049496661 @default.
- W2018229991 hasConcept C127413603 @default.
- W2018229991 hasConcept C145148216 @default.
- W2018229991 hasConcept C166524527 @default.
- W2018229991 hasConcept C178790620 @default.
- W2018229991 hasConcept C185592680 @default.
- W2018229991 hasConcept C191897082 @default.
- W2018229991 hasConcept C192562407 @default.
- W2018229991 hasConcept C2777431650 @default.
- W2018229991 hasConcept C2779105228 @default.
- W2018229991 hasConcept C2779851234 @default.
- W2018229991 hasConcept C41823505 @default.
- W2018229991 hasConcept C42360764 @default.
- W2018229991 hasConcept C506065880 @default.
- W2018229991 hasConcept C544956773 @default.
- W2018229991 hasConceptScore W2018229991C127413603 @default.
- W2018229991 hasConceptScore W2018229991C145148216 @default.
- W2018229991 hasConceptScore W2018229991C166524527 @default.
- W2018229991 hasConceptScore W2018229991C178790620 @default.
- W2018229991 hasConceptScore W2018229991C185592680 @default.
- W2018229991 hasConceptScore W2018229991C191897082 @default.
- W2018229991 hasConceptScore W2018229991C192562407 @default.
- W2018229991 hasConceptScore W2018229991C2777431650 @default.
- W2018229991 hasConceptScore W2018229991C2779105228 @default.
- W2018229991 hasConceptScore W2018229991C2779851234 @default.
- W2018229991 hasConceptScore W2018229991C41823505 @default.
- W2018229991 hasConceptScore W2018229991C42360764 @default.
- W2018229991 hasConceptScore W2018229991C506065880 @default.
- W2018229991 hasConceptScore W2018229991C544956773 @default.
- W2018229991 hasLocation W20182299911 @default.
- W2018229991 hasOpenAccess W2018229991 @default.
- W2018229991 hasPrimaryLocation W20182299911 @default.
- W2018229991 hasRelatedWork W1989284672 @default.
- W2018229991 hasRelatedWork W2016995842 @default.
- W2018229991 hasRelatedWork W2051802127 @default.
- W2018229991 hasRelatedWork W2062522449 @default.
- W2018229991 hasRelatedWork W2076572501 @default.
- W2018229991 hasRelatedWork W2386990292 @default.
- W2018229991 hasRelatedWork W272864539 @default.
- W2018229991 hasRelatedWork W2760103236 @default.
- W2018229991 hasRelatedWork W3101130858 @default.
- W2018229991 hasRelatedWork W4324333888 @default.
- W2018229991 hasVolume "139" @default.
- W2018229991 isParatext "false" @default.
- W2018229991 isRetracted "false" @default.
- W2018229991 magId "2018229991" @default.
- W2018229991 workType "article" @default.