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• W2018240116 abstract "Abstract Resonant alpha scattering has been used to determine detailed depth profiles of carbon in amorphous silicon carbon alloys produced by glow discharge decomposition. The carbon profiles exhibit a two layer structure similar to that indicated by hydrogen profiles in a-Si: H films. By comparison electron probe analysis seems to considerably overestimate average carbon content while electron energy loss measurements on very thin specimens agree with the surface layer content in the resonance profiles of thicker films. The bulk content is, however, still lower." @default.
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• W2018240116 date "1986-04-01" @default.
• W2018240116 modified "2023-10-07" @default.
• W2018240116 title "Analysis of carbon content and distribution in a-Si1−xCx:H films by resonant scattering" @default.
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• W2018240116 doi "https://doi.org/10.1016/0168-583x(86)90382-4" @default.
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