Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018245220> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2018245220 endingPage "6760" @default.
- W2018245220 startingPage "6754" @default.
- W2018245220 abstract "Normally required high substrate temperature for achieving epitaxial film growth can be replaced by low-energy (<30 eV), high-current-density (∼1 mA/cm2) ion bombardment during film deposition. For this a Si substrate wafer was immersed like a large negative Langmuir probe in a low-pressure (5×10−4 Torr) mercury vapor plasma while receiving Si atoms sputtered from a Si wafer target. The Hg plasma was created by extracting a 4-A discharge current at 25-V discharge voltage from a Hg cathode spot on a liquid-Hg pool. Electron channeling patterns proved that uniform Si spitaxial films can be obtained over the whole substrate wafer area at temperatures not exceeding 300 °C. The best epitaxial films were obtained when the substrate is bombarded (by biasing) during deposition with 23-eV Hg ions. The electrical properties of the coatings indicated that the films were close, but not yet of device quality because of the impurities inherent in our non-ultrahigh-vacuum nonbakable Pyrex chamber pumped only with a 12-ℓ/s Hg diffusion pump." @default.
- W2018245220 created "2016-06-24" @default.
- W2018245220 creator A5010528694 @default.
- W2018245220 creator A5046069047 @default.
- W2018245220 creator A5047811277 @default.
- W2018245220 creator A5089755840 @default.
- W2018245220 date "1988-12-15" @default.
- W2018245220 modified "2023-10-16" @default.
- W2018245220 title "Substituting low-energy (<30 eV) ion bombardment for elevated temperature in silicon epitaxy" @default.
- W2018245220 cites W1978240244 @default.
- W2018245220 cites W1998523464 @default.
- W2018245220 cites W2017598082 @default.
- W2018245220 cites W2021831694 @default.
- W2018245220 cites W2030703213 @default.
- W2018245220 cites W2035200126 @default.
- W2018245220 cites W2041761060 @default.
- W2018245220 cites W2043231991 @default.
- W2018245220 cites W2057635866 @default.
- W2018245220 cites W2066847025 @default.
- W2018245220 cites W2079587001 @default.
- W2018245220 cites W2103184452 @default.
- W2018245220 cites W2103282623 @default.
- W2018245220 cites W2171383992 @default.
- W2018245220 doi "https://doi.org/10.1063/1.342008" @default.
- W2018245220 hasPublicationYear "1988" @default.
- W2018245220 type Work @default.
- W2018245220 sameAs 2018245220 @default.
- W2018245220 citedByCount "18" @default.
- W2018245220 countsByYear W20182452202022 @default.
- W2018245220 crossrefType "journal-article" @default.
- W2018245220 hasAuthorship W2018245220A5010528694 @default.
- W2018245220 hasAuthorship W2018245220A5046069047 @default.
- W2018245220 hasAuthorship W2018245220A5047811277 @default.
- W2018245220 hasAuthorship W2018245220A5089755840 @default.
- W2018245220 hasConcept C110738630 @default.
- W2018245220 hasConcept C111368507 @default.
- W2018245220 hasConcept C113196181 @default.
- W2018245220 hasConcept C121332964 @default.
- W2018245220 hasConcept C127313418 @default.
- W2018245220 hasConcept C145148216 @default.
- W2018245220 hasConcept C147789679 @default.
- W2018245220 hasConcept C160671074 @default.
- W2018245220 hasConcept C171250308 @default.
- W2018245220 hasConcept C178790620 @default.
- W2018245220 hasConcept C185592680 @default.
- W2018245220 hasConcept C192562407 @default.
- W2018245220 hasConcept C2777289219 @default.
- W2018245220 hasConcept C2779227376 @default.
- W2018245220 hasConcept C30646810 @default.
- W2018245220 hasConcept C43617362 @default.
- W2018245220 hasConcept C49040817 @default.
- W2018245220 hasConcept C49110097 @default.
- W2018245220 hasConcept C544956773 @default.
- W2018245220 hasConcept C57410435 @default.
- W2018245220 hasConcept C97355855 @default.
- W2018245220 hasConceptScore W2018245220C110738630 @default.
- W2018245220 hasConceptScore W2018245220C111368507 @default.
- W2018245220 hasConceptScore W2018245220C113196181 @default.
- W2018245220 hasConceptScore W2018245220C121332964 @default.
- W2018245220 hasConceptScore W2018245220C127313418 @default.
- W2018245220 hasConceptScore W2018245220C145148216 @default.
- W2018245220 hasConceptScore W2018245220C147789679 @default.
- W2018245220 hasConceptScore W2018245220C160671074 @default.
- W2018245220 hasConceptScore W2018245220C171250308 @default.
- W2018245220 hasConceptScore W2018245220C178790620 @default.
- W2018245220 hasConceptScore W2018245220C185592680 @default.
- W2018245220 hasConceptScore W2018245220C192562407 @default.
- W2018245220 hasConceptScore W2018245220C2777289219 @default.
- W2018245220 hasConceptScore W2018245220C2779227376 @default.
- W2018245220 hasConceptScore W2018245220C30646810 @default.
- W2018245220 hasConceptScore W2018245220C43617362 @default.
- W2018245220 hasConceptScore W2018245220C49040817 @default.
- W2018245220 hasConceptScore W2018245220C49110097 @default.
- W2018245220 hasConceptScore W2018245220C544956773 @default.
- W2018245220 hasConceptScore W2018245220C57410435 @default.
- W2018245220 hasConceptScore W2018245220C97355855 @default.
- W2018245220 hasIssue "12" @default.
- W2018245220 hasLocation W20182452201 @default.
- W2018245220 hasOpenAccess W2018245220 @default.
- W2018245220 hasPrimaryLocation W20182452201 @default.
- W2018245220 hasRelatedWork W1982864195 @default.
- W2018245220 hasRelatedWork W2009964935 @default.
- W2018245220 hasRelatedWork W2013557620 @default.
- W2018245220 hasRelatedWork W2020503418 @default.
- W2018245220 hasRelatedWork W2020589345 @default.
- W2018245220 hasRelatedWork W2067662551 @default.
- W2018245220 hasRelatedWork W2079270301 @default.
- W2018245220 hasRelatedWork W2150512723 @default.
- W2018245220 hasRelatedWork W2946454824 @default.
- W2018245220 hasRelatedWork W2951422007 @default.
- W2018245220 hasVolume "64" @default.
- W2018245220 isParatext "false" @default.
- W2018245220 isRetracted "false" @default.
- W2018245220 magId "2018245220" @default.
- W2018245220 workType "article" @default.