Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018247079> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2018247079 endingPage "2946" @default.
- W2018247079 startingPage "2939" @default.
- W2018247079 abstract "Electron and negative ion densities in the afterglow and in the plasma initiation phase of a 13.56-MHz rf discharge in CF4 were measured by using a microwave cavity method and a laser photodetachment technique. Measurements were carried out at low rf powers (≲10 W) and in the pressure range from 100 to 300 mTorr. The electron density in the afterglow showed an enhanced decay rate due to the presence of negative ions. Electrons originating from negative ions through associative collisional detachment with neutral radicals were also detected in the afterglow. Decay curve analysis of the negative ion density gave an ion–ion (presumably CF+3−F−) recombination rate constant of (5±2)×10−13 m3 s−1, and showed that, in the active plasma, the negative ion loss rates by associative detachment and ion–ion recombination are of the same order of magnitude. The behavior of the electron and negative ion densities in the plasma initiation phase indicates that molecules and radicals that slowly accumulate in the plasma do not play a significant role in the production of negative ions." @default.
- W2018247079 created "2016-06-24" @default.
- W2018247079 creator A5015489356 @default.
- W2018247079 creator A5041601965 @default.
- W2018247079 creator A5077005339 @default.
- W2018247079 creator A5090935006 @default.
- W2018247079 date "1991-09-15" @default.
- W2018247079 modified "2023-10-16" @default.
- W2018247079 title "Temporal behavior of the electron and negative ion densities in a pulsed radio-frequency CF4 plasma" @default.
- W2018247079 cites W1968761733 @default.
- W2018247079 cites W1975395992 @default.
- W2018247079 cites W1983410622 @default.
- W2018247079 cites W1986319564 @default.
- W2018247079 cites W1993632607 @default.
- W2018247079 cites W1999748944 @default.
- W2018247079 cites W2005527431 @default.
- W2018247079 cites W2032477939 @default.
- W2018247079 cites W2060049126 @default.
- W2018247079 cites W2067586846 @default.
- W2018247079 cites W2085875717 @default.
- W2018247079 cites W2087144857 @default.
- W2018247079 cites W2090391505 @default.
- W2018247079 cites W2091038349 @default.
- W2018247079 cites W2094416891 @default.
- W2018247079 cites W2105379718 @default.
- W2018247079 doi "https://doi.org/10.1063/1.349318" @default.
- W2018247079 hasPublicationYear "1991" @default.
- W2018247079 type Work @default.
- W2018247079 sameAs 2018247079 @default.
- W2018247079 citedByCount "78" @default.
- W2018247079 countsByYear W20182470792013 @default.
- W2018247079 countsByYear W20182470792014 @default.
- W2018247079 countsByYear W20182470792015 @default.
- W2018247079 countsByYear W20182470792016 @default.
- W2018247079 countsByYear W20182470792021 @default.
- W2018247079 countsByYear W20182470792022 @default.
- W2018247079 crossrefType "journal-article" @default.
- W2018247079 hasAuthorship W2018247079A5015489356 @default.
- W2018247079 hasAuthorship W2018247079A5041601965 @default.
- W2018247079 hasAuthorship W2018247079A5077005339 @default.
- W2018247079 hasAuthorship W2018247079A5090935006 @default.
- W2018247079 hasBestOaLocation W20182470792 @default.
- W2018247079 hasConcept C121332964 @default.
- W2018247079 hasConcept C125485243 @default.
- W2018247079 hasConcept C1276947 @default.
- W2018247079 hasConcept C145148216 @default.
- W2018247079 hasConcept C147120987 @default.
- W2018247079 hasConcept C17599544 @default.
- W2018247079 hasConcept C178790620 @default.
- W2018247079 hasConcept C184779094 @default.
- W2018247079 hasConcept C185592680 @default.
- W2018247079 hasConcept C2777036043 @default.
- W2018247079 hasConcept C62520636 @default.
- W2018247079 hasConcept C82706917 @default.
- W2018247079 hasConceptScore W2018247079C121332964 @default.
- W2018247079 hasConceptScore W2018247079C125485243 @default.
- W2018247079 hasConceptScore W2018247079C1276947 @default.
- W2018247079 hasConceptScore W2018247079C145148216 @default.
- W2018247079 hasConceptScore W2018247079C147120987 @default.
- W2018247079 hasConceptScore W2018247079C17599544 @default.
- W2018247079 hasConceptScore W2018247079C178790620 @default.
- W2018247079 hasConceptScore W2018247079C184779094 @default.
- W2018247079 hasConceptScore W2018247079C185592680 @default.
- W2018247079 hasConceptScore W2018247079C2777036043 @default.
- W2018247079 hasConceptScore W2018247079C62520636 @default.
- W2018247079 hasConceptScore W2018247079C82706917 @default.
- W2018247079 hasIssue "6" @default.
- W2018247079 hasLocation W20182470791 @default.
- W2018247079 hasLocation W20182470792 @default.
- W2018247079 hasLocation W20182470793 @default.
- W2018247079 hasOpenAccess W2018247079 @default.
- W2018247079 hasPrimaryLocation W20182470791 @default.
- W2018247079 hasRelatedWork W1965131386 @default.
- W2018247079 hasRelatedWork W1966913416 @default.
- W2018247079 hasRelatedWork W2042030770 @default.
- W2018247079 hasRelatedWork W2116201318 @default.
- W2018247079 hasRelatedWork W2121139191 @default.
- W2018247079 hasRelatedWork W2155552404 @default.
- W2018247079 hasRelatedWork W99228725 @default.
- W2018247079 hasRelatedWork W2019437472 @default.
- W2018247079 hasRelatedWork W2083108293 @default.
- W2018247079 hasRelatedWork W2189598887 @default.
- W2018247079 hasVolume "70" @default.
- W2018247079 isParatext "false" @default.
- W2018247079 isRetracted "false" @default.
- W2018247079 magId "2018247079" @default.
- W2018247079 workType "article" @default.