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- W2018282971 endingPage "834" @default.
- W2018282971 startingPage "831" @default.
- W2018282971 abstract "SiC samples implanted at 600°C with 1018, 1019, or 1020 cm-3 of Al to a depth of ~ 0.3 μm and annealed with a (BN)AlN cap at temperatures ranging from 1300 – 1700°C were studied. Some of the samples have been co-implanted with C or Si. They are examined using Hall, sheet resistivity, CL, EPR, RBS, and TEM measurements. In all instances the sheet resistance is larger than a comparably doped epitaxial layer, with the difference being larger for samples doped to higher levels. The results suggest that not all of the damage can be annealed out, as stable defects appear to form, and a greater number or more complex defects form at the higher concentrations. Further, the defects affect the properties of the Al as no EPR peak is detected for implanted Al, and the implanted Al reduces the AlSi peak intensity in bulk SiC. CL measurements show that there is a peak near 2.9941 eV that disappears only at the highest annealing temperature suggesting it is associated with a complex defect. The DI peaks persist at all annealing temperatures, and are possibly associated with a Si terminated partial dislocation. TEM analyses indicate that the defects are stacking faults and/or dislocations, and that these faulted regions can grow during annealing. This is confirmed by RBS measurements." @default.
- W2018282971 created "2016-06-24" @default.
- W2018282971 creator A5003388235 @default.
- W2018282971 creator A5017096115 @default.
- W2018282971 creator A5032355268 @default.
- W2018282971 creator A5037772173 @default.
- W2018282971 creator A5039572991 @default.
- W2018282971 creator A5039896279 @default.
- W2018282971 creator A5041297515 @default.
- W2018282971 creator A5072605793 @default.
- W2018282971 creator A5078100269 @default.
- W2018282971 date "2006-10-01" @default.
- W2018282971 modified "2023-10-01" @default.
- W2018282971 title "Variations in the Effects of Implanting Al at Different Concentrations into SiC" @default.
- W2018282971 cites W1592499035 @default.
- W2018282971 cites W1980823168 @default.
- W2018282971 cites W1991162574 @default.
- W2018282971 cites W2004797732 @default.
- W2018282971 cites W2009322279 @default.
- W2018282971 cites W2038326517 @default.
- W2018282971 cites W2082328851 @default.
- W2018282971 doi "https://doi.org/10.4028/www.scientific.net/msf.527-529.831" @default.
- W2018282971 hasPublicationYear "2006" @default.
- W2018282971 type Work @default.
- W2018282971 sameAs 2018282971 @default.
- W2018282971 citedByCount "0" @default.
- W2018282971 crossrefType "journal-article" @default.
- W2018282971 hasAuthorship W2018282971A5003388235 @default.
- W2018282971 hasAuthorship W2018282971A5017096115 @default.
- W2018282971 hasAuthorship W2018282971A5032355268 @default.
- W2018282971 hasAuthorship W2018282971A5037772173 @default.
- W2018282971 hasAuthorship W2018282971A5039572991 @default.
- W2018282971 hasAuthorship W2018282971A5039896279 @default.
- W2018282971 hasAuthorship W2018282971A5041297515 @default.
- W2018282971 hasAuthorship W2018282971A5072605793 @default.
- W2018282971 hasAuthorship W2018282971A5078100269 @default.
- W2018282971 hasConcept C110738630 @default.
- W2018282971 hasConcept C113196181 @default.
- W2018282971 hasConcept C119599485 @default.
- W2018282971 hasConcept C121332964 @default.
- W2018282971 hasConcept C127413603 @default.
- W2018282971 hasConcept C159122135 @default.
- W2018282971 hasConcept C159985019 @default.
- W2018282971 hasConcept C185592680 @default.
- W2018282971 hasConcept C187961010 @default.
- W2018282971 hasConcept C192562407 @default.
- W2018282971 hasConcept C2777855556 @default.
- W2018282971 hasConcept C2779227376 @default.
- W2018282971 hasConcept C33347731 @default.
- W2018282971 hasConcept C43617362 @default.
- W2018282971 hasConcept C46141821 @default.
- W2018282971 hasConcept C49040817 @default.
- W2018282971 hasConcept C57863236 @default.
- W2018282971 hasConcept C66825105 @default.
- W2018282971 hasConcept C69990965 @default.
- W2018282971 hasConcept C8010536 @default.
- W2018282971 hasConceptScore W2018282971C110738630 @default.
- W2018282971 hasConceptScore W2018282971C113196181 @default.
- W2018282971 hasConceptScore W2018282971C119599485 @default.
- W2018282971 hasConceptScore W2018282971C121332964 @default.
- W2018282971 hasConceptScore W2018282971C127413603 @default.
- W2018282971 hasConceptScore W2018282971C159122135 @default.
- W2018282971 hasConceptScore W2018282971C159985019 @default.
- W2018282971 hasConceptScore W2018282971C185592680 @default.
- W2018282971 hasConceptScore W2018282971C187961010 @default.
- W2018282971 hasConceptScore W2018282971C192562407 @default.
- W2018282971 hasConceptScore W2018282971C2777855556 @default.
- W2018282971 hasConceptScore W2018282971C2779227376 @default.
- W2018282971 hasConceptScore W2018282971C33347731 @default.
- W2018282971 hasConceptScore W2018282971C43617362 @default.
- W2018282971 hasConceptScore W2018282971C46141821 @default.
- W2018282971 hasConceptScore W2018282971C49040817 @default.
- W2018282971 hasConceptScore W2018282971C57863236 @default.
- W2018282971 hasConceptScore W2018282971C66825105 @default.
- W2018282971 hasConceptScore W2018282971C69990965 @default.
- W2018282971 hasConceptScore W2018282971C8010536 @default.
- W2018282971 hasLocation W20182829711 @default.
- W2018282971 hasOpenAccess W2018282971 @default.
- W2018282971 hasPrimaryLocation W20182829711 @default.
- W2018282971 hasRelatedWork W1984679394 @default.
- W2018282971 hasRelatedWork W1992139126 @default.
- W2018282971 hasRelatedWork W2007522409 @default.
- W2018282971 hasRelatedWork W2069785070 @default.
- W2018282971 hasRelatedWork W2171670411 @default.
- W2018282971 hasRelatedWork W2341423334 @default.
- W2018282971 hasRelatedWork W2342878234 @default.
- W2018282971 hasRelatedWork W2372897635 @default.
- W2018282971 hasRelatedWork W2405558454 @default.
- W2018282971 hasRelatedWork W2511021840 @default.
- W2018282971 hasVolume "527-529" @default.
- W2018282971 isParatext "false" @default.
- W2018282971 isRetracted "false" @default.
- W2018282971 magId "2018282971" @default.
- W2018282971 workType "article" @default.