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- W2018283451 abstract "In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10− 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties." @default.
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- W2018283451 title "Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering" @default.
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- W2018283451 doi "https://doi.org/10.1016/j.tsf.2008.10.019" @default.
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