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• W2018285202 endingPage "454" @default.
• W2018285202 startingPage "447" @default.
• W2018285202 abstract "Delta doping of Si in Al0.22Ga0.78As by low pressure metalorganic vapor phase epitaxy has been explored for growth interruption times ranging from 10 to 60 s and for varying SiH4 partial pressures of 7.8 X 10-4 and 1.2 X 10-3 mbar. The resultant sheet concentrations were linear with both time and SiH4 content up to saturation at 3.6 X 1012 cm-2. The full width at half maximum versus sheet concentration was found to correspond to theoretical predictions, indicating the absence of diffusion, with a minimum value of 60 Å for a sheet concentration of 3.6 X 1012 cm-2. For Si doses higher than 1 X 10-2ml SiH4, an increase in full width at half maximum (FWHM) was observed. Pseudomorphic high electron mobility transistor device results show a 300 K channel mobility of 3030 cm2/V⋯ s with a sheet concentration of 2.7 X 1012cm-2. The maximum extrinsic transconductance of such devices was 400 mS/mm with a corresponding saturation current of 360 mA/mm for 0.5 μm gate length devices." @default.
• W2018285202 created "2016-06-24" @default.
• W2018285202 creator A5004712843 @default.
• W2018285202 creator A5009724780 @default.
• W2018285202 creator A5018830134 @default.
• W2018285202 creator A5021688029 @default.
• W2018285202 creator A5049719934 @default.
• W2018285202 creator A5080673778 @default.
• W2018285202 date "1994-12-01" @default.
• W2018285202 modified "2023-09-27" @default.
• W2018285202 title "Silicon delta-doped AlGaAs by low pressure metalorganic vapor phase epitaxy" @default.
• W2018285202 cites W1967592860 @default.
• W2018285202 cites W1974749679 @default.
• W2018285202 cites W1975108681 @default.
• W2018285202 cites W1976376093 @default.
• W2018285202 cites W1988627461 @default.
• W2018285202 cites W1996294359 @default.
• W2018285202 cites W2010298143 @default.
• W2018285202 cites W2011045214 @default.
• W2018285202 cites W2011669897 @default.
• W2018285202 cites W2017682836 @default.
• W2018285202 cites W2021073886 @default.
• W2018285202 cites W2029672604 @default.
• W2018285202 cites W2041928015 @default.
• W2018285202 cites W2059509391 @default.
• W2018285202 cites W2060163602 @default.
• W2018285202 cites W2159043429 @default.
• W2018285202 doi "https://doi.org/10.1016/0022-0248(94)91090-1" @default.
• W2018285202 hasPublicationYear "1994" @default.
• W2018285202 type Work @default.
• W2018285202 sameAs 2018285202 @default.
• W2018285202 citedByCount "2" @default.
• W2018285202 crossrefType "journal-article" @default.
• W2018285202 hasAuthorship W2018285202A5004712843 @default.
• W2018285202 hasAuthorship W2018285202A5009724780 @default.
• W2018285202 hasAuthorship W2018285202A5018830134 @default.
• W2018285202 hasAuthorship W2018285202A5021688029 @default.
• W2018285202 hasAuthorship W2018285202A5049719934 @default.
• W2018285202 hasAuthorship W2018285202A5080673778 @default.
• W2018285202 hasConcept C106782819 @default.
• W2018285202 hasConcept C108649604 @default.
• W2018285202 hasConcept C110738630 @default.
• W2018285202 hasConcept C113196181 @default.
• W2018285202 hasConcept C114614502 @default.
• W2018285202 hasConcept C119599485 @default.
• W2018285202 hasConcept C121332964 @default.
• W2018285202 hasConcept C127413603 @default.
• W2018285202 hasConcept C155891486 @default.
• W2018285202 hasConcept C165801399 @default.
• W2018285202 hasConcept C171250308 @default.
• W2018285202 hasConcept C172385210 @default.
• W2018285202 hasConcept C185592680 @default.
• W2018285202 hasConcept C192562407 @default.
• W2018285202 hasConcept C2779227376 @default.
• W2018285202 hasConcept C2779283907 @default.
• W2018285202 hasConcept C3018640491 @default.
• W2018285202 hasConcept C33923547 @default.
• W2018285202 hasConcept C43617362 @default.
• W2018285202 hasConcept C49040817 @default.
• W2018285202 hasConcept C544956773 @default.
• W2018285202 hasConcept C57863236 @default.
• W2018285202 hasConcept C97355855 @default.
• W2018285202 hasConcept C9930424 @default.
• W2018285202 hasConceptScore W2018285202C106782819 @default.
• W2018285202 hasConceptScore W2018285202C108649604 @default.
• W2018285202 hasConceptScore W2018285202C110738630 @default.
• W2018285202 hasConceptScore W2018285202C113196181 @default.
• W2018285202 hasConceptScore W2018285202C114614502 @default.
• W2018285202 hasConceptScore W2018285202C119599485 @default.
• W2018285202 hasConceptScore W2018285202C121332964 @default.
• W2018285202 hasConceptScore W2018285202C127413603 @default.
• W2018285202 hasConceptScore W2018285202C155891486 @default.
• W2018285202 hasConceptScore W2018285202C165801399 @default.
• W2018285202 hasConceptScore W2018285202C171250308 @default.
• W2018285202 hasConceptScore W2018285202C172385210 @default.
• W2018285202 hasConceptScore W2018285202C185592680 @default.
• W2018285202 hasConceptScore W2018285202C192562407 @default.
• W2018285202 hasConceptScore W2018285202C2779227376 @default.
• W2018285202 hasConceptScore W2018285202C2779283907 @default.
• W2018285202 hasConceptScore W2018285202C3018640491 @default.
• W2018285202 hasConceptScore W2018285202C33923547 @default.
• W2018285202 hasConceptScore W2018285202C43617362 @default.
• W2018285202 hasConceptScore W2018285202C49040817 @default.
• W2018285202 hasConceptScore W2018285202C544956773 @default.
• W2018285202 hasConceptScore W2018285202C57863236 @default.
• W2018285202 hasConceptScore W2018285202C97355855 @default.
• W2018285202 hasConceptScore W2018285202C9930424 @default.
• W2018285202 hasIssue "1-4" @default.
• W2018285202 hasLocation W20182852021 @default.
• W2018285202 hasOpenAccess W2018285202 @default.
• W2018285202 hasPrimaryLocation W20182852021 @default.
• W2018285202 hasRelatedWork W1827420834 @default.
• W2018285202 hasRelatedWork W2005194554 @default.
• W2018285202 hasRelatedWork W2018285202 @default.
• W2018285202 hasRelatedWork W2019234249 @default.
• W2018285202 hasRelatedWork W2024094677 @default.
• W2018285202 hasRelatedWork W2053339020 @default.
• W2018285202 hasRelatedWork W2069111017 @default.

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