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- W2018316834 abstract "A poly-silicon piston micro-mirror array, which has been enhanced with a multilayer coating to exhibit special reflective properties at Cu K<sub>α</sub> emission line of 1.54 Å is presented. The micro-mirror array is fabricated using the MEMSCAP PolyMUMPs process and packaged in a ceramic package. The packaged array is coated using atomic layer deposition with an Al<sub>2</sub>O<sub>3</sub>/W multilayer. The first Al<sub>2</sub>O<sub>3</sub> layer is thicker than for a normal bilayer pair and prevents the mirror coating from creating an electrical short. This device was tested before and after coating. The snap-down voltage was reduced by half, but qualitatively the mechanical motion remained similar. The fabrication process presented for the Cu K<sub>α</sub> wavelength at 1.54 Å can be easily adapted to other optical MEMS and for other wavelengths." @default.
- W2018316834 created "2016-06-24" @default.
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- W2018316834 date "2005-01-22" @default.
- W2018316834 modified "2023-09-23" @default.
- W2018316834 title "Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength" @default.
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- W2018316834 doi "https://doi.org/10.1117/12.590429" @default.
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