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- W2018317316 abstract "The information of the chromium top layer is important in photomask fabrication. Resist coating process and opticaltransmittance change of chromium after mask cleaning process depend on the surface morphology and thickness. In thispaper, we present that ellipsometry, the nondestructive optical measurement method, is an effective and convenientmethod for the inspection of chromium oxide on the quartz blank. We checked data obtained by ellipsometry forchromium surface morphology with atomic force microscope, for surface energy with contact angle measurement, andfor optical density change with optical transmittance measurement. It turns out that ellipsometry gives successfully theinformation of chromium oxide on the quartz blank." @default.
- W2018317316 created "2016-06-24" @default.
- W2018317316 creator A5013399712 @default.
- W2018317316 creator A5060548403 @default.
- W2018317316 creator A5061761135 @default.
- W2018317316 creator A5064036462 @default.
- W2018317316 creator A5089719649 @default.
- W2018317316 creator A5089797962 @default.
- W2018317316 date "2009-04-24" @default.
- W2018317316 modified "2023-09-23" @default.
- W2018317316 title "A new optical measurement method for verifying the exact change of thin films on the QZ blanks with ellipsometer" @default.
- W2018317316 doi "https://doi.org/10.1117/12.824315" @default.
- W2018317316 hasPublicationYear "2009" @default.
- W2018317316 type Work @default.
- W2018317316 sameAs 2018317316 @default.
- W2018317316 citedByCount "0" @default.
- W2018317316 crossrefType "proceedings-article" @default.
- W2018317316 hasAuthorship W2018317316A5013399712 @default.
- W2018317316 hasAuthorship W2018317316A5060548403 @default.
- W2018317316 hasAuthorship W2018317316A5061761135 @default.
- W2018317316 hasAuthorship W2018317316A5064036462 @default.
- W2018317316 hasAuthorship W2018317316A5089719649 @default.
- W2018317316 hasAuthorship W2018317316A5089797962 @default.
- W2018317316 hasConcept C120665830 @default.
- W2018317316 hasConcept C121332964 @default.
- W2018317316 hasConcept C150493377 @default.
- W2018317316 hasConcept C159985019 @default.
- W2018317316 hasConcept C171250308 @default.
- W2018317316 hasConcept C18293161 @default.
- W2018317316 hasConcept C19067145 @default.
- W2018317316 hasConcept C191897082 @default.
- W2018317316 hasConcept C192562407 @default.
- W2018317316 hasConcept C2778089247 @default.
- W2018317316 hasConcept C49040817 @default.
- W2018317316 hasConcept C511782168 @default.
- W2018317316 hasConceptScore W2018317316C120665830 @default.
- W2018317316 hasConceptScore W2018317316C121332964 @default.
- W2018317316 hasConceptScore W2018317316C150493377 @default.
- W2018317316 hasConceptScore W2018317316C159985019 @default.
- W2018317316 hasConceptScore W2018317316C171250308 @default.
- W2018317316 hasConceptScore W2018317316C18293161 @default.
- W2018317316 hasConceptScore W2018317316C19067145 @default.
- W2018317316 hasConceptScore W2018317316C191897082 @default.
- W2018317316 hasConceptScore W2018317316C192562407 @default.
- W2018317316 hasConceptScore W2018317316C2778089247 @default.
- W2018317316 hasConceptScore W2018317316C49040817 @default.
- W2018317316 hasConceptScore W2018317316C511782168 @default.
- W2018317316 hasLocation W20183173161 @default.
- W2018317316 hasOpenAccess W2018317316 @default.
- W2018317316 hasPrimaryLocation W20183173161 @default.
- W2018317316 hasRelatedWork W166468551 @default.
- W2018317316 hasRelatedWork W1964672475 @default.
- W2018317316 hasRelatedWork W1966948228 @default.
- W2018317316 hasRelatedWork W1980727221 @default.
- W2018317316 hasRelatedWork W1994994819 @default.
- W2018317316 hasRelatedWork W1999977781 @default.
- W2018317316 hasRelatedWork W2001366105 @default.
- W2018317316 hasRelatedWork W2002865391 @default.
- W2018317316 hasRelatedWork W2014565032 @default.
- W2018317316 hasRelatedWork W2041384045 @default.
- W2018317316 hasRelatedWork W2053592809 @default.
- W2018317316 hasRelatedWork W2066127811 @default.
- W2018317316 hasRelatedWork W2071328673 @default.
- W2018317316 hasRelatedWork W2075874591 @default.
- W2018317316 hasRelatedWork W2084863668 @default.
- W2018317316 hasRelatedWork W2139695553 @default.
- W2018317316 hasRelatedWork W2207306556 @default.
- W2018317316 hasRelatedWork W2370478387 @default.
- W2018317316 hasRelatedWork W2004969372 @default.
- W2018317316 hasRelatedWork W2014574640 @default.
- W2018317316 isParatext "false" @default.
- W2018317316 isRetracted "false" @default.
- W2018317316 magId "2018317316" @default.
- W2018317316 workType "article" @default.