FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018322904> ?p ?o ?g. }

• W2018322904 endingPage "1358" @default.
• W2018322904 startingPage "1351" @default.
• W2018322904 abstract "A novel fabrication process for low-temperature (<500 °C) polysilicon thin film transistors (TFTs) is proposed. The main features of such process are: (i) the source and drain contacts formation by deposition and lift-off of doped layers, allowing to eliminate ion-implantation; (ii) the use of a single excimer laser annealing step for active layer crystallization and doping activation. The gradual doping profile, resulting from the adopted contact formation process and further smeared by the laser annealing, enables a drain field reduction, if compared to doping profiles that can be achieved by conventional techniques. This allows a substantial reduction of the “field enhanced” mechanisms, affecting the electrical characteristics of polysilicon TFTs at high source/drain voltages, such as kink effect and leakage current. The present process, thanks to the above mentioned features, can be rather attractive for polysilicon TFTs applications." @default.
• W2018322904 created "2016-06-24" @default.
• W2018322904 creator A5002798375 @default.
• W2018322904 creator A5021002400 @default.
• W2018322904 creator A5028837909 @default.
• W2018322904 creator A5029760654 @default.
• W2018322904 creator A5035616199 @default.
• W2018322904 creator A5036331674 @default.
• W2018322904 creator A5052821986 @default.
• W2018322904 creator A5058987996 @default.
• W2018322904 creator A5083035565 @default.
• W2018322904 date "2002-09-01" @default.
• W2018322904 modified "2023-10-01" @default.
• W2018322904 title "A novel fabrication process for polysilicon thin film transistors with source/drain contacts formed by deposition and lift-off of highly doped layers" @default.
• W2018322904 cites W1968236284 @default.
• W2018322904 cites W1981352808 @default.
• W2018322904 cites W1987330991 @default.
• W2018322904 cites W2001899268 @default.
• W2018322904 cites W2028756086 @default.
• W2018322904 cites W2029070382 @default.
• W2018322904 cites W2042076254 @default.
• W2018322904 cites W2055138041 @default.
• W2018322904 cites W2065171052 @default.
• W2018322904 cites W2065822580 @default.
• W2018322904 cites W2067945394 @default.
• W2018322904 cites W2070844778 @default.
• W2018322904 cites W2104729395 @default.
• W2018322904 cites W2106433385 @default.
• W2018322904 cites W2126986042 @default.
• W2018322904 cites W2142191240 @default.
• W2018322904 doi "https://doi.org/10.1016/s0038-1101(02)00082-5" @default.
• W2018322904 hasPublicationYear "2002" @default.
• W2018322904 type Work @default.
• W2018322904 sameAs 2018322904 @default.
• W2018322904 citedByCount "15" @default.
• W2018322904 countsByYear W20183229042013 @default.
• W2018322904 countsByYear W20183229042021 @default.
• W2018322904 countsByYear W20183229042022 @default.
• W2018322904 crossrefType "journal-article" @default.
• W2018322904 hasAuthorship W2018322904A5002798375 @default.
• W2018322904 hasAuthorship W2018322904A5021002400 @default.
• W2018322904 hasAuthorship W2018322904A5028837909 @default.
• W2018322904 hasAuthorship W2018322904A5029760654 @default.
• W2018322904 hasAuthorship W2018322904A5035616199 @default.
• W2018322904 hasAuthorship W2018322904A5036331674 @default.
• W2018322904 hasAuthorship W2018322904A5052821986 @default.
• W2018322904 hasAuthorship W2018322904A5058987996 @default.
• W2018322904 hasAuthorship W2018322904A5083035565 @default.
• W2018322904 hasConcept C119599485 @default.
• W2018322904 hasConcept C120665830 @default.
• W2018322904 hasConcept C121332964 @default.
• W2018322904 hasConcept C127413603 @default.
• W2018322904 hasConcept C136525101 @default.
• W2018322904 hasConcept C142724271 @default.
• W2018322904 hasConcept C159985019 @default.
• W2018322904 hasConcept C165801399 @default.
• W2018322904 hasConcept C171250308 @default.
• W2018322904 hasConcept C172385210 @default.
• W2018322904 hasConcept C192562407 @default.
• W2018322904 hasConcept C204787440 @default.
• W2018322904 hasConcept C2361726 @default.
• W2018322904 hasConcept C24326235 @default.
• W2018322904 hasConcept C25356406 @default.
• W2018322904 hasConcept C2777855556 @default.
• W2018322904 hasConcept C2779227376 @default.
• W2018322904 hasConcept C2780477314 @default.
• W2018322904 hasConcept C49040817 @default.
• W2018322904 hasConcept C520434653 @default.
• W2018322904 hasConcept C57863236 @default.
• W2018322904 hasConcept C71924100 @default.
• W2018322904 hasConcept C87359718 @default.
• W2018322904 hasConceptScore W2018322904C119599485 @default.
• W2018322904 hasConceptScore W2018322904C120665830 @default.
• W2018322904 hasConceptScore W2018322904C121332964 @default.
• W2018322904 hasConceptScore W2018322904C127413603 @default.
• W2018322904 hasConceptScore W2018322904C136525101 @default.
• W2018322904 hasConceptScore W2018322904C142724271 @default.
• W2018322904 hasConceptScore W2018322904C159985019 @default.
• W2018322904 hasConceptScore W2018322904C165801399 @default.
• W2018322904 hasConceptScore W2018322904C171250308 @default.
• W2018322904 hasConceptScore W2018322904C172385210 @default.
• W2018322904 hasConceptScore W2018322904C192562407 @default.
• W2018322904 hasConceptScore W2018322904C204787440 @default.
• W2018322904 hasConceptScore W2018322904C2361726 @default.
• W2018322904 hasConceptScore W2018322904C24326235 @default.
• W2018322904 hasConceptScore W2018322904C25356406 @default.
• W2018322904 hasConceptScore W2018322904C2777855556 @default.
• W2018322904 hasConceptScore W2018322904C2779227376 @default.
• W2018322904 hasConceptScore W2018322904C2780477314 @default.
• W2018322904 hasConceptScore W2018322904C49040817 @default.
• W2018322904 hasConceptScore W2018322904C520434653 @default.
• W2018322904 hasConceptScore W2018322904C57863236 @default.
• W2018322904 hasConceptScore W2018322904C71924100 @default.
• W2018322904 hasConceptScore W2018322904C87359718 @default.
• W2018322904 hasIssue "9" @default.
• W2018322904 hasLocation W20183229041 @default.
• W2018322904 hasOpenAccess W2018322904 @default.
• W2018322904 hasPrimaryLocation W20183229041 @default.

• next