Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018370897> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2018370897 endingPage "3280" @default.
- W2018370897 startingPage "3278" @default.
- W2018370897 abstract "Boron doping induced surface roughening was observed in conventional silicon molecular beam epitaxy. Reflection high energy electron diffraction and cross-sectional transmission electron microscopy revealed that as growth continued, the growth surface remained no longer planar but developed {113} facets. The facets evolved along with growth, and finally resulted in a severely roughened surface. The evolution of the roughening was found to remain the same in the boron doping concentration range of 1×1017–2×1020 cm−3 and the growth temperature range of 500–650 °C. This surface roughening effect is attributed to boron segregation behavior." @default.
- W2018370897 created "2016-06-24" @default.
- W2018370897 creator A5000523173 @default.
- W2018370897 creator A5010804247 @default.
- W2018370897 creator A5055683436 @default.
- W2018370897 creator A5084456971 @default.
- W2018370897 creator A5089282641 @default.
- W2018370897 date "1996-06-03" @default.
- W2018370897 modified "2023-09-24" @default.
- W2018370897 title "Observation of boron doping induced surface roughening in silicon molecular beam epitaxy" @default.
- W2018370897 doi "https://doi.org/10.1063/1.116573" @default.
- W2018370897 hasPublicationYear "1996" @default.
- W2018370897 type Work @default.
- W2018370897 sameAs 2018370897 @default.
- W2018370897 citedByCount "5" @default.
- W2018370897 countsByYear W20183708972015 @default.
- W2018370897 countsByYear W20183708972019 @default.
- W2018370897 crossrefType "journal-article" @default.
- W2018370897 hasAuthorship W2018370897A5000523173 @default.
- W2018370897 hasAuthorship W2018370897A5010804247 @default.
- W2018370897 hasAuthorship W2018370897A5055683436 @default.
- W2018370897 hasAuthorship W2018370897A5084456971 @default.
- W2018370897 hasAuthorship W2018370897A5089282641 @default.
- W2018370897 hasConcept C110738630 @default.
- W2018370897 hasConcept C113196181 @default.
- W2018370897 hasConcept C120665830 @default.
- W2018370897 hasConcept C121332964 @default.
- W2018370897 hasConcept C146088050 @default.
- W2018370897 hasConcept C171250308 @default.
- W2018370897 hasConcept C178790620 @default.
- W2018370897 hasConcept C185592680 @default.
- W2018370897 hasConcept C192562407 @default.
- W2018370897 hasConcept C207114421 @default.
- W2018370897 hasConcept C2779227376 @default.
- W2018370897 hasConcept C3792809 @default.
- W2018370897 hasConcept C43617362 @default.
- W2018370897 hasConcept C49040817 @default.
- W2018370897 hasConcept C501308230 @default.
- W2018370897 hasConcept C544956773 @default.
- W2018370897 hasConcept C57863236 @default.
- W2018370897 hasConcept C77557913 @default.
- W2018370897 hasConceptScore W2018370897C110738630 @default.
- W2018370897 hasConceptScore W2018370897C113196181 @default.
- W2018370897 hasConceptScore W2018370897C120665830 @default.
- W2018370897 hasConceptScore W2018370897C121332964 @default.
- W2018370897 hasConceptScore W2018370897C146088050 @default.
- W2018370897 hasConceptScore W2018370897C171250308 @default.
- W2018370897 hasConceptScore W2018370897C178790620 @default.
- W2018370897 hasConceptScore W2018370897C185592680 @default.
- W2018370897 hasConceptScore W2018370897C192562407 @default.
- W2018370897 hasConceptScore W2018370897C207114421 @default.
- W2018370897 hasConceptScore W2018370897C2779227376 @default.
- W2018370897 hasConceptScore W2018370897C3792809 @default.
- W2018370897 hasConceptScore W2018370897C43617362 @default.
- W2018370897 hasConceptScore W2018370897C49040817 @default.
- W2018370897 hasConceptScore W2018370897C501308230 @default.
- W2018370897 hasConceptScore W2018370897C544956773 @default.
- W2018370897 hasConceptScore W2018370897C57863236 @default.
- W2018370897 hasConceptScore W2018370897C77557913 @default.
- W2018370897 hasIssue "23" @default.
- W2018370897 hasLocation W20183708971 @default.
- W2018370897 hasOpenAccess W2018370897 @default.
- W2018370897 hasPrimaryLocation W20183708971 @default.
- W2018370897 hasRelatedWork W1975034124 @default.
- W2018370897 hasRelatedWork W2000543377 @default.
- W2018370897 hasRelatedWork W2001541608 @default.
- W2018370897 hasRelatedWork W2033669323 @default.
- W2018370897 hasRelatedWork W2034823108 @default.
- W2018370897 hasRelatedWork W2060985488 @default.
- W2018370897 hasRelatedWork W2067624534 @default.
- W2018370897 hasRelatedWork W2074953504 @default.
- W2018370897 hasRelatedWork W2092524599 @default.
- W2018370897 hasRelatedWork W87179318 @default.
- W2018370897 hasVolume "68" @default.
- W2018370897 isParatext "false" @default.
- W2018370897 isRetracted "false" @default.
- W2018370897 magId "2018370897" @default.
- W2018370897 workType "article" @default.