Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018376677> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2018376677 abstract "The structural and electrical properties of BF<SUB>2</SUB><SUP>+</SUP> implanted PECVD tungsten nitride thin film were investigated. After BF<SUB>2</SUB><SUP>+</SUP> implantation with 40keV and 1 X 10<SUP>17</SUP> B ions/cm<SUP>2</SUP>, W-B<SUP>+</SUP>-N layer was formed at the surface region of W-N films. The ternary layer maintained the microcrystalline state and prevented nitrogen out-diffusion form W-N thin film after annealing at 800 degrees C for 30 min. The overall electrical resistivity of W-B<SUP>+</SUP>-N/W-N thin film is 200 (mu) (Omega) cm, which is higher than that of W-N thin film because of forming the ternary phase. BF<SUB>2</SUB><SUP>+</SUP> implanted tungsten nitride thin film improved thermal stability against Cu diffusion more than W-N thin film." @default.
- W2018376677 created "2016-06-24" @default.
- W2018376677 creator A5009057362 @default.
- W2018376677 creator A5023284703 @default.
- W2018376677 creator A5029682904 @default.
- W2018376677 creator A5069869461 @default.
- W2018376677 creator A5091660120 @default.
- W2018376677 date "1999-04-27" @default.
- W2018376677 modified "2023-09-23" @default.
- W2018376677 title "Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF 2+implantation" @default.
- W2018376677 doi "https://doi.org/10.1117/12.346932" @default.
- W2018376677 hasPublicationYear "1999" @default.
- W2018376677 type Work @default.
- W2018376677 sameAs 2018376677 @default.
- W2018376677 citedByCount "0" @default.
- W2018376677 crossrefType "proceedings-article" @default.
- W2018376677 hasAuthorship W2018376677A5009057362 @default.
- W2018376677 hasAuthorship W2018376677A5023284703 @default.
- W2018376677 hasAuthorship W2018376677A5029682904 @default.
- W2018376677 hasAuthorship W2018376677A5069869461 @default.
- W2018376677 hasAuthorship W2018376677A5091660120 @default.
- W2018376677 hasConcept C113196181 @default.
- W2018376677 hasConcept C119599485 @default.
- W2018376677 hasConcept C127413603 @default.
- W2018376677 hasConcept C159985019 @default.
- W2018376677 hasConcept C171250308 @default.
- W2018376677 hasConcept C178790620 @default.
- W2018376677 hasConcept C185592680 @default.
- W2018376677 hasConcept C19067145 @default.
- W2018376677 hasConcept C191897082 @default.
- W2018376677 hasConcept C192562407 @default.
- W2018376677 hasConcept C194760766 @default.
- W2018376677 hasConcept C199360897 @default.
- W2018376677 hasConcept C2777855556 @default.
- W2018376677 hasConcept C2778836790 @default.
- W2018376677 hasConcept C2779227376 @default.
- W2018376677 hasConcept C38347018 @default.
- W2018376677 hasConcept C41008148 @default.
- W2018376677 hasConcept C43617362 @default.
- W2018376677 hasConcept C542268612 @default.
- W2018376677 hasConcept C59061564 @default.
- W2018376677 hasConcept C64452783 @default.
- W2018376677 hasConcept C69990965 @default.
- W2018376677 hasConceptScore W2018376677C113196181 @default.
- W2018376677 hasConceptScore W2018376677C119599485 @default.
- W2018376677 hasConceptScore W2018376677C127413603 @default.
- W2018376677 hasConceptScore W2018376677C159985019 @default.
- W2018376677 hasConceptScore W2018376677C171250308 @default.
- W2018376677 hasConceptScore W2018376677C178790620 @default.
- W2018376677 hasConceptScore W2018376677C185592680 @default.
- W2018376677 hasConceptScore W2018376677C19067145 @default.
- W2018376677 hasConceptScore W2018376677C191897082 @default.
- W2018376677 hasConceptScore W2018376677C192562407 @default.
- W2018376677 hasConceptScore W2018376677C194760766 @default.
- W2018376677 hasConceptScore W2018376677C199360897 @default.
- W2018376677 hasConceptScore W2018376677C2777855556 @default.
- W2018376677 hasConceptScore W2018376677C2778836790 @default.
- W2018376677 hasConceptScore W2018376677C2779227376 @default.
- W2018376677 hasConceptScore W2018376677C38347018 @default.
- W2018376677 hasConceptScore W2018376677C41008148 @default.
- W2018376677 hasConceptScore W2018376677C43617362 @default.
- W2018376677 hasConceptScore W2018376677C542268612 @default.
- W2018376677 hasConceptScore W2018376677C59061564 @default.
- W2018376677 hasConceptScore W2018376677C64452783 @default.
- W2018376677 hasConceptScore W2018376677C69990965 @default.
- W2018376677 hasLocation W20183766771 @default.
- W2018376677 hasOpenAccess W2018376677 @default.
- W2018376677 hasPrimaryLocation W20183766771 @default.
- W2018376677 hasRelatedWork W1510147627 @default.
- W2018376677 hasRelatedWork W1970333227 @default.
- W2018376677 hasRelatedWork W1991815892 @default.
- W2018376677 hasRelatedWork W1994902560 @default.
- W2018376677 hasRelatedWork W2009875711 @default.
- W2018376677 hasRelatedWork W2015155099 @default.
- W2018376677 hasRelatedWork W2023028750 @default.
- W2018376677 hasRelatedWork W2038314583 @default.
- W2018376677 hasRelatedWork W2041334540 @default.
- W2018376677 hasRelatedWork W2045578753 @default.
- W2018376677 hasRelatedWork W2051346942 @default.
- W2018376677 hasRelatedWork W2068804063 @default.
- W2018376677 hasRelatedWork W2072358281 @default.
- W2018376677 hasRelatedWork W2073111937 @default.
- W2018376677 hasRelatedWork W2076946523 @default.
- W2018376677 hasRelatedWork W2080722578 @default.
- W2018376677 hasRelatedWork W2083278323 @default.
- W2018376677 hasRelatedWork W2126646238 @default.
- W2018376677 hasRelatedWork W2163209793 @default.
- W2018376677 hasRelatedWork W2955176355 @default.
- W2018376677 isParatext "false" @default.
- W2018376677 isRetracted "false" @default.
- W2018376677 magId "2018376677" @default.
- W2018376677 workType "article" @default.